JPS6425549A - Transfer apparatus - Google Patents
Transfer apparatusInfo
- Publication number
- JPS6425549A JPS6425549A JP62181094A JP18109487A JPS6425549A JP S6425549 A JPS6425549 A JP S6425549A JP 62181094 A JP62181094 A JP 62181094A JP 18109487 A JP18109487 A JP 18109487A JP S6425549 A JPS6425549 A JP S6425549A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- jig
- hand
- sucking
- transferred
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Specific Conveyance Elements (AREA)
Abstract
PURPOSE:To prevent the contamination and breakdown of a material to be transferred and to improve productivity, when the material to be transferred is transferred between a first jig and a second jig, by providing a hand, which sucks and holds the material to be transferred, and providing a transfer apparatus, which moves said hand. CONSTITUTION:When a wafer in a jig 2 is held with a hand 31, it is moved to input/output parts of the carrier jig 2 with a robot. The outer peripheral part of each wafer 1 is inserted into a sucking part 36 of a sucking head 35. The wafer 1 is sucked with the sucking part 36 by the sucking force of a sucking port 37. The wafer is sealed with a sucking pad 38. The hand 31, which sucks and holds the wafer 1 and pulls the wafer out of the carrier jig 1, is moved on a part directly over a special jig 5 with the robot. When the hand 31 is vertically lowered, the wafer is inputted into the special jig 5 along a mounting surface. When the wafer 1 is inserted into a specified height, the sucking force of the sucking port 37 is cut with the control of a controller. The wafer 1 is transferred into the jig 5. When the holding of the wafer 1 is released, the hand 31 is lifted vertically. Then the hand is moved to the position of the jig 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62181094A JPS6425549A (en) | 1987-07-22 | 1987-07-22 | Transfer apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62181094A JPS6425549A (en) | 1987-07-22 | 1987-07-22 | Transfer apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6425549A true JPS6425549A (en) | 1989-01-27 |
Family
ID=16094724
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62181094A Pending JPS6425549A (en) | 1987-07-22 | 1987-07-22 | Transfer apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6425549A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04369243A (en) * | 1991-06-17 | 1992-12-22 | Nissin Electric Co Ltd | Wafer conveyor mechanism |
JP2019189939A (en) * | 2018-04-18 | 2019-10-31 | キヤノントッキ株式会社 | Work piece housing device and work piece housing method and evaporation method using the same |
-
1987
- 1987-07-22 JP JP62181094A patent/JPS6425549A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04369243A (en) * | 1991-06-17 | 1992-12-22 | Nissin Electric Co Ltd | Wafer conveyor mechanism |
JP2019189939A (en) * | 2018-04-18 | 2019-10-31 | キヤノントッキ株式会社 | Work piece housing device and work piece housing method and evaporation method using the same |
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