JPS6464335A - Wafer handling device - Google Patents

Wafer handling device

Info

Publication number
JPS6464335A
JPS6464335A JP62221278A JP22127887A JPS6464335A JP S6464335 A JPS6464335 A JP S6464335A JP 62221278 A JP62221278 A JP 62221278A JP 22127887 A JP22127887 A JP 22127887A JP S6464335 A JPS6464335 A JP S6464335A
Authority
JP
Japan
Prior art keywords
elevator
door
cassette
box
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62221278A
Other languages
Japanese (ja)
Inventor
Giichi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62221278A priority Critical patent/JPS6464335A/en
Publication of JPS6464335A publication Critical patent/JPS6464335A/en
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Warehouses Or Storage Devices (AREA)
  • De-Stacking Of Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To perform loading and unloading without temporarily stocking a box at another place by coupling a port door with an elevator only when a cassette is introduced to or discharged from the box, simultaneously laterally moving the elevator and an arm by a moving unit, and moving freely the cassette among a loader, an unloader and a port. CONSTITUTION:A box 1 for containing a cassette 4 is first placed on a port door 6. In this case, an elevator 8 is bonded to the door 6. The elevator 8 is moved down, and the cassette 4 is removed from the box 1. The cassette 4 is grasped by an arm 9, the elevator 8 is moved up, and the door 6 and a box door 2 are returned to the position of the port. Then, the door 6 is locked at a port plate 5, the elevator 8 is separated from the door 6, and the elevator 8 is moved down. A moving unit 12 is moved laterally in parallel along a guide 11 in this state, and moved to a position before a loader of a semiconductor manufacturing apparatus 10.
JP62221278A 1987-09-04 1987-09-04 Wafer handling device Pending JPS6464335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62221278A JPS6464335A (en) 1987-09-04 1987-09-04 Wafer handling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62221278A JPS6464335A (en) 1987-09-04 1987-09-04 Wafer handling device

Publications (1)

Publication Number Publication Date
JPS6464335A true JPS6464335A (en) 1989-03-10

Family

ID=16764273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62221278A Pending JPS6464335A (en) 1987-09-04 1987-09-04 Wafer handling device

Country Status (1)

Country Link
JP (1) JPS6464335A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069137U (en) * 1992-07-08 1994-02-04 株式会社ダイフク Plate-shaped storage container
US5538390A (en) * 1993-10-29 1996-07-23 Applied Materials, Inc. Enclosure for load lock interface
US5697750A (en) * 1992-11-06 1997-12-16 Applied Materials, Inc. Controlled environment enclosure and mechanical interface
US5730573A (en) * 1994-02-22 1998-03-24 Tdk Corporation Clean transfer method and apparatus therefor
US6152680A (en) * 1997-08-26 2000-11-28 Daitron, Inc. Wafer cassette rotation mechanism

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069137U (en) * 1992-07-08 1994-02-04 株式会社ダイフク Plate-shaped storage container
US5697750A (en) * 1992-11-06 1997-12-16 Applied Materials, Inc. Controlled environment enclosure and mechanical interface
US6352403B1 (en) 1992-11-06 2002-03-05 Applied Materials, Inc. Controlled environment enclosure and mechanical interface
US5538390A (en) * 1993-10-29 1996-07-23 Applied Materials, Inc. Enclosure for load lock interface
US5730573A (en) * 1994-02-22 1998-03-24 Tdk Corporation Clean transfer method and apparatus therefor
US6062808A (en) * 1994-02-22 2000-05-16 Tdk Corporation Clean transfer method and apparatus therefor
US6152680A (en) * 1997-08-26 2000-11-28 Daitron, Inc. Wafer cassette rotation mechanism

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