JPS6464335A - Wafer handling device - Google Patents
Wafer handling deviceInfo
- Publication number
- JPS6464335A JPS6464335A JP62221278A JP22127887A JPS6464335A JP S6464335 A JPS6464335 A JP S6464335A JP 62221278 A JP62221278 A JP 62221278A JP 22127887 A JP22127887 A JP 22127887A JP S6464335 A JPS6464335 A JP S6464335A
- Authority
- JP
- Japan
- Prior art keywords
- elevator
- door
- cassette
- box
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Workpieces (AREA)
- Warehouses Or Storage Devices (AREA)
- De-Stacking Of Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To perform loading and unloading without temporarily stocking a box at another place by coupling a port door with an elevator only when a cassette is introduced to or discharged from the box, simultaneously laterally moving the elevator and an arm by a moving unit, and moving freely the cassette among a loader, an unloader and a port. CONSTITUTION:A box 1 for containing a cassette 4 is first placed on a port door 6. In this case, an elevator 8 is bonded to the door 6. The elevator 8 is moved down, and the cassette 4 is removed from the box 1. The cassette 4 is grasped by an arm 9, the elevator 8 is moved up, and the door 6 and a box door 2 are returned to the position of the port. Then, the door 6 is locked at a port plate 5, the elevator 8 is separated from the door 6, and the elevator 8 is moved down. A moving unit 12 is moved laterally in parallel along a guide 11 in this state, and moved to a position before a loader of a semiconductor manufacturing apparatus 10.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62221278A JPS6464335A (en) | 1987-09-04 | 1987-09-04 | Wafer handling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62221278A JPS6464335A (en) | 1987-09-04 | 1987-09-04 | Wafer handling device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6464335A true JPS6464335A (en) | 1989-03-10 |
Family
ID=16764273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62221278A Pending JPS6464335A (en) | 1987-09-04 | 1987-09-04 | Wafer handling device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6464335A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH069137U (en) * | 1992-07-08 | 1994-02-04 | 株式会社ダイフク | Plate-shaped storage container |
US5538390A (en) * | 1993-10-29 | 1996-07-23 | Applied Materials, Inc. | Enclosure for load lock interface |
US5697750A (en) * | 1992-11-06 | 1997-12-16 | Applied Materials, Inc. | Controlled environment enclosure and mechanical interface |
US5730573A (en) * | 1994-02-22 | 1998-03-24 | Tdk Corporation | Clean transfer method and apparatus therefor |
US6152680A (en) * | 1997-08-26 | 2000-11-28 | Daitron, Inc. | Wafer cassette rotation mechanism |
-
1987
- 1987-09-04 JP JP62221278A patent/JPS6464335A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH069137U (en) * | 1992-07-08 | 1994-02-04 | 株式会社ダイフク | Plate-shaped storage container |
US5697750A (en) * | 1992-11-06 | 1997-12-16 | Applied Materials, Inc. | Controlled environment enclosure and mechanical interface |
US6352403B1 (en) | 1992-11-06 | 2002-03-05 | Applied Materials, Inc. | Controlled environment enclosure and mechanical interface |
US5538390A (en) * | 1993-10-29 | 1996-07-23 | Applied Materials, Inc. | Enclosure for load lock interface |
US5730573A (en) * | 1994-02-22 | 1998-03-24 | Tdk Corporation | Clean transfer method and apparatus therefor |
US6062808A (en) * | 1994-02-22 | 2000-05-16 | Tdk Corporation | Clean transfer method and apparatus therefor |
US6152680A (en) * | 1997-08-26 | 2000-11-28 | Daitron, Inc. | Wafer cassette rotation mechanism |
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