JPS643139B2 - - Google Patents
Info
- Publication number
- JPS643139B2 JPS643139B2 JP59221221A JP22122184A JPS643139B2 JP S643139 B2 JPS643139 B2 JP S643139B2 JP 59221221 A JP59221221 A JP 59221221A JP 22122184 A JP22122184 A JP 22122184A JP S643139 B2 JPS643139 B2 JP S643139B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- fluorine
- fluorine gas
- neutralizing agent
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 65
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 43
- 229910052731 fluorine Inorganic materials 0.000 claims description 43
- 239000011737 fluorine Substances 0.000 claims description 43
- 239000003795 chemical substances by application Substances 0.000 claims description 18
- 230000003472 neutralizing effect Effects 0.000 claims description 18
- 239000002912 waste gas Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 description 8
- 239000001307 helium Substances 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000007865 diluting Methods 0.000 description 3
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000001291 vacuum drying Methods 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59221221A JPS61101231A (ja) | 1984-10-23 | 1984-10-23 | フツ素ガスの除去方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59221221A JPS61101231A (ja) | 1984-10-23 | 1984-10-23 | フツ素ガスの除去方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61101231A JPS61101231A (ja) | 1986-05-20 |
| JPS643139B2 true JPS643139B2 (enrdf_load_stackoverflow) | 1989-01-19 |
Family
ID=16763361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59221221A Granted JPS61101231A (ja) | 1984-10-23 | 1984-10-23 | フツ素ガスの除去方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61101231A (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1229210B (it) * | 1988-03-31 | 1991-07-25 | Central Glass Co Ltd | Metodo e dispositivo per analizzare gas contenenti fluoro. |
| US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
| GB8813270D0 (en) * | 1988-06-04 | 1988-07-06 | Plasma Products Ltd | Dry exhaust gas conditioning |
| US6060034A (en) * | 1998-06-02 | 2000-05-09 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Abatement system for ClF3 containing exhaust gases |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| GB0520468D0 (en) | 2005-10-07 | 2005-11-16 | Boc Group Plc | Fluorine abatement |
| WO2017094418A1 (ja) * | 2015-12-01 | 2017-06-08 | 昭和電工株式会社 | フッ素元素を含有する排ガスの処理方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210418A (en) * | 1975-07-10 | 1977-01-26 | Katayama Chem Works Co Ltd | Controlling agent against adhesive organisms living in the sea |
-
1984
- 1984-10-23 JP JP59221221A patent/JPS61101231A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61101231A (ja) | 1986-05-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |