JPS643139B2 - - Google Patents

Info

Publication number
JPS643139B2
JPS643139B2 JP59221221A JP22122184A JPS643139B2 JP S643139 B2 JPS643139 B2 JP S643139B2 JP 59221221 A JP59221221 A JP 59221221A JP 22122184 A JP22122184 A JP 22122184A JP S643139 B2 JPS643139 B2 JP S643139B2
Authority
JP
Japan
Prior art keywords
gas
fluorine
fluorine gas
neutralizing agent
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59221221A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61101231A (ja
Inventor
Minoru Aramaki
Masayuki Kawaguchi
Tamio Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP59221221A priority Critical patent/JPS61101231A/ja
Publication of JPS61101231A publication Critical patent/JPS61101231A/ja
Publication of JPS643139B2 publication Critical patent/JPS643139B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP59221221A 1984-10-23 1984-10-23 フツ素ガスの除去方法 Granted JPS61101231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59221221A JPS61101231A (ja) 1984-10-23 1984-10-23 フツ素ガスの除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59221221A JPS61101231A (ja) 1984-10-23 1984-10-23 フツ素ガスの除去方法

Publications (2)

Publication Number Publication Date
JPS61101231A JPS61101231A (ja) 1986-05-20
JPS643139B2 true JPS643139B2 (enrdf_load_stackoverflow) 1989-01-19

Family

ID=16763361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59221221A Granted JPS61101231A (ja) 1984-10-23 1984-10-23 フツ素ガスの除去方法

Country Status (1)

Country Link
JP (1) JPS61101231A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1229210B (it) * 1988-03-31 1991-07-25 Central Glass Co Ltd Metodo e dispositivo per analizzare gas contenenti fluoro.
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
GB8813270D0 (en) * 1988-06-04 1988-07-06 Plasma Products Ltd Dry exhaust gas conditioning
US6060034A (en) * 1998-06-02 2000-05-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for ClF3 containing exhaust gases
US6309618B1 (en) 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
GB0520468D0 (en) 2005-10-07 2005-11-16 Boc Group Plc Fluorine abatement
WO2017094418A1 (ja) * 2015-12-01 2017-06-08 昭和電工株式会社 フッ素元素を含有する排ガスの処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5210418A (en) * 1975-07-10 1977-01-26 Katayama Chem Works Co Ltd Controlling agent against adhesive organisms living in the sea

Also Published As

Publication number Publication date
JPS61101231A (ja) 1986-05-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees