JPS61101231A - フツ素ガスの除去方法 - Google Patents

フツ素ガスの除去方法

Info

Publication number
JPS61101231A
JPS61101231A JP59221221A JP22122184A JPS61101231A JP S61101231 A JPS61101231 A JP S61101231A JP 59221221 A JP59221221 A JP 59221221A JP 22122184 A JP22122184 A JP 22122184A JP S61101231 A JPS61101231 A JP S61101231A
Authority
JP
Japan
Prior art keywords
gas
fluorine
neutralizing agent
less
fluorine gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59221221A
Other languages
English (en)
Japanese (ja)
Other versions
JPS643139B2 (enrdf_load_stackoverflow
Inventor
Minoru Aramaki
荒牧 稔
Masayuki Kawaguchi
雅之 川口
Tamio Nakamura
中村 民夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP59221221A priority Critical patent/JPS61101231A/ja
Publication of JPS61101231A publication Critical patent/JPS61101231A/ja
Publication of JPS643139B2 publication Critical patent/JPS643139B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP59221221A 1984-10-23 1984-10-23 フツ素ガスの除去方法 Granted JPS61101231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59221221A JPS61101231A (ja) 1984-10-23 1984-10-23 フツ素ガスの除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59221221A JPS61101231A (ja) 1984-10-23 1984-10-23 フツ素ガスの除去方法

Publications (2)

Publication Number Publication Date
JPS61101231A true JPS61101231A (ja) 1986-05-20
JPS643139B2 JPS643139B2 (enrdf_load_stackoverflow) 1989-01-19

Family

ID=16763361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59221221A Granted JPS61101231A (ja) 1984-10-23 1984-10-23 フツ素ガスの除去方法

Country Status (1)

Country Link
JP (1) JPS61101231A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5017499A (en) * 1988-03-31 1991-05-21 Central Glass Company, Limited Method for analyzing fluorine containing gases
US5213767A (en) * 1988-06-04 1993-05-25 Boc Limited Dry exhaust gas conditioning
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
US6060034A (en) * 1998-06-02 2000-05-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for ClF3 containing exhaust gases
US6309618B1 (en) 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
US8834824B2 (en) 2005-10-07 2014-09-16 Edwards Limited Method of treating a gas stream
TWI624299B (zh) * 2015-12-01 2018-05-21 Showa Denko Kk Treatment method of exhaust gas containing fluorine element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5210418A (en) * 1975-07-10 1977-01-26 Katayama Chem Works Co Ltd Controlling agent against adhesive organisms living in the sea

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5210418A (en) * 1975-07-10 1977-01-26 Katayama Chem Works Co Ltd Controlling agent against adhesive organisms living in the sea

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5017499A (en) * 1988-03-31 1991-05-21 Central Glass Company, Limited Method for analyzing fluorine containing gases
US5149659A (en) * 1988-03-31 1992-09-22 Central Glass Company, Limited Method and apparatus for analyzing fluorine containing gases
US5213767A (en) * 1988-06-04 1993-05-25 Boc Limited Dry exhaust gas conditioning
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
US6060034A (en) * 1998-06-02 2000-05-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for ClF3 containing exhaust gases
US6309618B1 (en) 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
US8834824B2 (en) 2005-10-07 2014-09-16 Edwards Limited Method of treating a gas stream
TWI624299B (zh) * 2015-12-01 2018-05-21 Showa Denko Kk Treatment method of exhaust gas containing fluorine element

Also Published As

Publication number Publication date
JPS643139B2 (enrdf_load_stackoverflow) 1989-01-19

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