JPS61101231A - フツ素ガスの除去方法 - Google Patents
フツ素ガスの除去方法Info
- Publication number
- JPS61101231A JPS61101231A JP59221221A JP22122184A JPS61101231A JP S61101231 A JPS61101231 A JP S61101231A JP 59221221 A JP59221221 A JP 59221221A JP 22122184 A JP22122184 A JP 22122184A JP S61101231 A JPS61101231 A JP S61101231A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- fluorine
- neutralizing agent
- less
- fluorine gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052731 fluorine Inorganic materials 0.000 title claims abstract description 42
- 239000011737 fluorine Substances 0.000 title claims abstract description 42
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 239000007789 gas Substances 0.000 claims abstract description 69
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 22
- 230000003472 neutralizing effect Effects 0.000 claims abstract description 22
- 239000002912 waste gas Substances 0.000 claims abstract description 16
- 239000007787 solid Substances 0.000 claims abstract 5
- 238000000034 method Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 abstract description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- 239000011261 inert gas Substances 0.000 abstract description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract 2
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 abstract 1
- 239000000920 calcium hydroxide Substances 0.000 abstract 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 abstract 1
- 235000011116 calcium hydroxide Nutrition 0.000 abstract 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 abstract 1
- 235000017550 sodium carbonate Nutrition 0.000 abstract 1
- 229910000029 sodium carbonate Inorganic materials 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 description 7
- 239000001307 helium Substances 0.000 description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 6
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000007865 diluting Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 241001474791 Proboscis Species 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006115 defluorination reaction Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59221221A JPS61101231A (ja) | 1984-10-23 | 1984-10-23 | フツ素ガスの除去方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59221221A JPS61101231A (ja) | 1984-10-23 | 1984-10-23 | フツ素ガスの除去方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61101231A true JPS61101231A (ja) | 1986-05-20 |
| JPS643139B2 JPS643139B2 (enrdf_load_stackoverflow) | 1989-01-19 |
Family
ID=16763361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59221221A Granted JPS61101231A (ja) | 1984-10-23 | 1984-10-23 | フツ素ガスの除去方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61101231A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017499A (en) * | 1988-03-31 | 1991-05-21 | Central Glass Company, Limited | Method for analyzing fluorine containing gases |
| US5213767A (en) * | 1988-06-04 | 1993-05-25 | Boc Limited | Dry exhaust gas conditioning |
| US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
| US6060034A (en) * | 1998-06-02 | 2000-05-09 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Abatement system for ClF3 containing exhaust gases |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| US8834824B2 (en) | 2005-10-07 | 2014-09-16 | Edwards Limited | Method of treating a gas stream |
| TWI624299B (zh) * | 2015-12-01 | 2018-05-21 | Showa Denko Kk | Treatment method of exhaust gas containing fluorine element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210418A (en) * | 1975-07-10 | 1977-01-26 | Katayama Chem Works Co Ltd | Controlling agent against adhesive organisms living in the sea |
-
1984
- 1984-10-23 JP JP59221221A patent/JPS61101231A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210418A (en) * | 1975-07-10 | 1977-01-26 | Katayama Chem Works Co Ltd | Controlling agent against adhesive organisms living in the sea |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017499A (en) * | 1988-03-31 | 1991-05-21 | Central Glass Company, Limited | Method for analyzing fluorine containing gases |
| US5149659A (en) * | 1988-03-31 | 1992-09-22 | Central Glass Company, Limited | Method and apparatus for analyzing fluorine containing gases |
| US5213767A (en) * | 1988-06-04 | 1993-05-25 | Boc Limited | Dry exhaust gas conditioning |
| US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
| US6060034A (en) * | 1998-06-02 | 2000-05-09 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Abatement system for ClF3 containing exhaust gases |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| US8834824B2 (en) | 2005-10-07 | 2014-09-16 | Edwards Limited | Method of treating a gas stream |
| TWI624299B (zh) * | 2015-12-01 | 2018-05-21 | Showa Denko Kk | Treatment method of exhaust gas containing fluorine element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS643139B2 (enrdf_load_stackoverflow) | 1989-01-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |