JPS643098A - Production of diamond single crystal film - Google Patents
Production of diamond single crystal filmInfo
- Publication number
- JPS643098A JPS643098A JP15933087A JP15933087A JPS643098A JP S643098 A JPS643098 A JP S643098A JP 15933087 A JP15933087 A JP 15933087A JP 15933087 A JP15933087 A JP 15933087A JP S643098 A JPS643098 A JP S643098A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- single crystal
- crystal film
- diamond
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To facilitate production of a diamond film and reduce production cost thereof, by carrying out epitaxial growth on an oxide single crystal film formed on an oxide single crystal substrate or semiconductor substrate using a hydrocarbon compound gas and hydrogen as raw materials.
CONSTITUTION: An inner vacuum vessel 5 is preliminarily evacuated to a prescribed degree of vacuum by a vacuum discharge equipment 4 and a substrate 1 is put on a substrate-supporting table 2. As the substrate 1, a magnesia spinel single crystal substrate expressed by the chemical formula MgAl2O4 or MgO.nAl2O3 (1≤n≤3.5) or semiconductor substrate is used as a substrate 1. Then a reaction gas 6 consisting of hydrocarbon compound gas and hydrogen is introduced into the vacuum vessel 5, preheated by a infrared lamp 8 and heated to about ≥2,000°C by heat filament 10 to grow the diamond single crystal film on the substrate 1. Since the inexpensive substrate 1 is used at a low pressure, the diamond film is readily produced and production cost thereof is also reduced.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-159330A JPH013098A (en) | 1987-06-25 | Manufacturing method of diamond single crystal film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-159330A JPH013098A (en) | 1987-06-25 | Manufacturing method of diamond single crystal film |
Publications (3)
Publication Number | Publication Date |
---|---|
JPS643098A true JPS643098A (en) | 1989-01-06 |
JPH013098A JPH013098A (en) | 1989-01-06 |
JPH0527599B2 JPH0527599B2 (en) | 1993-04-21 |
Family
ID=
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5483084A (en) * | 1993-03-10 | 1996-01-09 | Canon Kabushiki Kaisha | Diamond covered member and process for producing the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61106494A (en) * | 1984-10-29 | 1986-05-24 | Kyocera Corp | Member coated with diamond and its production |
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61106494A (en) * | 1984-10-29 | 1986-05-24 | Kyocera Corp | Member coated with diamond and its production |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5483084A (en) * | 1993-03-10 | 1996-01-09 | Canon Kabushiki Kaisha | Diamond covered member and process for producing the same |
Also Published As
Publication number | Publication date |
---|---|
JPH0527599B2 (en) | 1993-04-21 |
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