JPS643098A - Production of diamond single crystal film - Google Patents

Production of diamond single crystal film

Info

Publication number
JPS643098A
JPS643098A JP15933087A JP15933087A JPS643098A JP S643098 A JPS643098 A JP S643098A JP 15933087 A JP15933087 A JP 15933087A JP 15933087 A JP15933087 A JP 15933087A JP S643098 A JPS643098 A JP S643098A
Authority
JP
Japan
Prior art keywords
substrate
single crystal
crystal film
diamond
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15933087A
Other languages
Japanese (ja)
Other versions
JPH0527599B2 (en
JPH013098A (en
Inventor
Kazutaka Fujii
Nobuaki Shohata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62-159330A priority Critical patent/JPH013098A/en
Priority claimed from JP62-159330A external-priority patent/JPH013098A/en
Publication of JPS643098A publication Critical patent/JPS643098A/en
Publication of JPH013098A publication Critical patent/JPH013098A/en
Publication of JPH0527599B2 publication Critical patent/JPH0527599B2/ja
Granted legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To facilitate production of a diamond film and reduce production cost thereof, by carrying out epitaxial growth on an oxide single crystal film formed on an oxide single crystal substrate or semiconductor substrate using a hydrocarbon compound gas and hydrogen as raw materials.
CONSTITUTION: An inner vacuum vessel 5 is preliminarily evacuated to a prescribed degree of vacuum by a vacuum discharge equipment 4 and a substrate 1 is put on a substrate-supporting table 2. As the substrate 1, a magnesia spinel single crystal substrate expressed by the chemical formula MgAl2O4 or MgO.nAl2O3 (1≤n≤3.5) or semiconductor substrate is used as a substrate 1. Then a reaction gas 6 consisting of hydrocarbon compound gas and hydrogen is introduced into the vacuum vessel 5, preheated by a infrared lamp 8 and heated to about ≥2,000°C by heat filament 10 to grow the diamond single crystal film on the substrate 1. Since the inexpensive substrate 1 is used at a low pressure, the diamond film is readily produced and production cost thereof is also reduced.
COPYRIGHT: (C)1989,JPO&Japio
JP62-159330A 1987-06-25 Manufacturing method of diamond single crystal film Granted JPH013098A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-159330A JPH013098A (en) 1987-06-25 Manufacturing method of diamond single crystal film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62-159330A JPH013098A (en) 1987-06-25 Manufacturing method of diamond single crystal film

Publications (3)

Publication Number Publication Date
JPS643098A true JPS643098A (en) 1989-01-06
JPH013098A JPH013098A (en) 1989-01-06
JPH0527599B2 JPH0527599B2 (en) 1993-04-21

Family

ID=

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5483084A (en) * 1993-03-10 1996-01-09 Canon Kabushiki Kaisha Diamond covered member and process for producing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61106494A (en) * 1984-10-29 1986-05-24 Kyocera Corp Member coated with diamond and its production

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61106494A (en) * 1984-10-29 1986-05-24 Kyocera Corp Member coated with diamond and its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5483084A (en) * 1993-03-10 1996-01-09 Canon Kabushiki Kaisha Diamond covered member and process for producing the same

Also Published As

Publication number Publication date
JPH0527599B2 (en) 1993-04-21

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