JPS6430671A - Dispenser nozzle device - Google Patents
Dispenser nozzle deviceInfo
- Publication number
- JPS6430671A JPS6430671A JP18822187A JP18822187A JPS6430671A JP S6430671 A JPS6430671 A JP S6430671A JP 18822187 A JP18822187 A JP 18822187A JP 18822187 A JP18822187 A JP 18822187A JP S6430671 A JPS6430671 A JP S6430671A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- liq
- tip
- dripping
- stanchion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Nozzles (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18822187A JPS6430671A (en) | 1987-07-27 | 1987-07-27 | Dispenser nozzle device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18822187A JPS6430671A (en) | 1987-07-27 | 1987-07-27 | Dispenser nozzle device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6430671A true JPS6430671A (en) | 1989-02-01 |
Family
ID=16219888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18822187A Pending JPS6430671A (en) | 1987-07-27 | 1987-07-27 | Dispenser nozzle device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6430671A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999016554A1 (fr) * | 1997-09-27 | 1999-04-08 | Tdk Corporation | Technique de revetement par centrifugation et appareil correspondant |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5889966A (ja) * | 1981-11-24 | 1983-05-28 | Hitachi Ltd | 塗布装置 |
-
1987
- 1987-07-27 JP JP18822187A patent/JPS6430671A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5889966A (ja) * | 1981-11-24 | 1983-05-28 | Hitachi Ltd | 塗布装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999016554A1 (fr) * | 1997-09-27 | 1999-04-08 | Tdk Corporation | Technique de revetement par centrifugation et appareil correspondant |
US6592936B2 (en) | 1997-09-27 | 2003-07-15 | Tdk Corporation | Spin coating method and coating apparatus |
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