JPS6430358U - - Google Patents
Info
- Publication number
- JPS6430358U JPS6430358U JP3564988U JP3564988U JPS6430358U JP S6430358 U JPS6430358 U JP S6430358U JP 3564988 U JP3564988 U JP 3564988U JP 3564988 U JP3564988 U JP 3564988U JP S6430358 U JPS6430358 U JP S6430358U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- substrate
- vapor phase
- metal thin
- active metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 3
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3564988U JPS6430358U (sv) | 1988-03-17 | 1988-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3564988U JPS6430358U (sv) | 1988-03-17 | 1988-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430358U true JPS6430358U (sv) | 1989-02-23 |
Family
ID=31262293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3564988U Pending JPS6430358U (sv) | 1988-03-17 | 1988-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430358U (sv) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59110775A (ja) * | 1982-12-13 | 1984-06-26 | Koujiyundo Kagaku Kenkyusho:Kk | 金属膜形成方法 |
-
1988
- 1988-03-17 JP JP3564988U patent/JPS6430358U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59110775A (ja) * | 1982-12-13 | 1984-06-26 | Koujiyundo Kagaku Kenkyusho:Kk | 金属膜形成方法 |
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