JPS6430212A - Substrate conveying tray for organic metal chemical vapor growth device - Google Patents
Substrate conveying tray for organic metal chemical vapor growth deviceInfo
- Publication number
- JPS6430212A JPS6430212A JP18700587A JP18700587A JPS6430212A JP S6430212 A JPS6430212 A JP S6430212A JP 18700587 A JP18700587 A JP 18700587A JP 18700587 A JP18700587 A JP 18700587A JP S6430212 A JPS6430212 A JP S6430212A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- conveying tray
- graphite
- retaining
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To reduce energy loss, to easily conduct the temperature control of a substrate, and to contrive to reduce the mixing of impurities into the thin film by a method wherein a conveying tray, made of graphite and having a silicon carbide film on the surface, which is placed on a retaining stand by holding the substrate, is used. CONSTITUTION:A retaining stand 18, which is induction-heated to the prescribed temperature by a high frequency coil 16 provided outside a bell jar 10, is arranged in a reaction chamber 12. A silicon carbide film is formed on the surface of the retaining stand 18 which is made of graphite. On the retaining stand 18, a substrate conveying tray 22, which retains and conveys the substrate, is detachably mounted. This conveying tray is also made of graphite and a silicon carbide film is formed on the surface. At this point, as the tray 22 is made of graphite which has a high thermal conductivity, heat is excellently conducted from the retaining stand 18 to the substrate 20. Accordingly, there is almost no temperature difference between the retaining stant 18 and the substrate 20, and the temperature of the substrate 20 can be relatively controlled accurately.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18700587A JPS6430212A (en) | 1987-07-27 | 1987-07-27 | Substrate conveying tray for organic metal chemical vapor growth device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18700587A JPS6430212A (en) | 1987-07-27 | 1987-07-27 | Substrate conveying tray for organic metal chemical vapor growth device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430212A true JPS6430212A (en) | 1989-02-01 |
Family
ID=16198536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18700587A Pending JPS6430212A (en) | 1987-07-27 | 1987-07-27 | Substrate conveying tray for organic metal chemical vapor growth device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430212A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115216843A (en) * | 2022-07-14 | 2022-10-21 | 深圳市纳设智能装备有限公司 | Graphite tray state detection method, device and system and terminal equipment |
-
1987
- 1987-07-27 JP JP18700587A patent/JPS6430212A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115216843A (en) * | 2022-07-14 | 2022-10-21 | 深圳市纳设智能装备有限公司 | Graphite tray state detection method, device and system and terminal equipment |
| CN115216843B (en) * | 2022-07-14 | 2023-07-07 | 深圳市纳设智能装备有限公司 | Graphite tray state detection method, device and system and terminal equipment |
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