JPS6427131A - Manufacture of superconductive thin film - Google Patents

Manufacture of superconductive thin film

Info

Publication number
JPS6427131A
JPS6427131A JP62183087A JP18308787A JPS6427131A JP S6427131 A JPS6427131 A JP S6427131A JP 62183087 A JP62183087 A JP 62183087A JP 18308787 A JP18308787 A JP 18308787A JP S6427131 A JPS6427131 A JP S6427131A
Authority
JP
Japan
Prior art keywords
base board
shutter
thin film
cua
gasify
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62183087A
Other languages
Japanese (ja)
Inventor
Tomoji Kawai
Osamu Yamaguchi
Yasunori Ando
Shuichi Nogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62183087A priority Critical patent/JPS6427131A/en
Publication of JPS6427131A publication Critical patent/JPS6427131A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Abstract

PURPOSE:To fabricate ceramic superconductive thin film uniform and of high quality easily by affixing the group IIa and group IIIa elements or oxides onto a base board by CVD and PVD method, respectively. CONSTITUTION:The group IIIa elements and those of copper type easy to gasify are affixed to a base board by the CVD method, while the group IIa hard to gasify by the PVD method. To form a superconductive film of YBa2Cu3O7, for ex., Y and Cu are affixed to the base board by the CVD method of radical jet type, while B by the MBE method. Gaseous yttrium cyclopentadienyl (YC) is used as Y material, while gaseous copper acetylacetonate (CuA) as Cu material. BaO is used as Ba material. From a nozzle 2 a mixture gas of YC, CuA, O2 and N2 is sprayed to the base board 5 by opening a shutter 6 and closing shutter 7. Then the shutter 7 is opened to irradiate the BaO molecular beam in a crucible 3 to the base board 5. This is repeated to form a film, which undergoes then a heat treatment.
JP62183087A 1987-07-21 1987-07-21 Manufacture of superconductive thin film Pending JPS6427131A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62183087A JPS6427131A (en) 1987-07-21 1987-07-21 Manufacture of superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62183087A JPS6427131A (en) 1987-07-21 1987-07-21 Manufacture of superconductive thin film

Publications (1)

Publication Number Publication Date
JPS6427131A true JPS6427131A (en) 1989-01-30

Family

ID=16129532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62183087A Pending JPS6427131A (en) 1987-07-21 1987-07-21 Manufacture of superconductive thin film

Country Status (1)

Country Link
JP (1) JPS6427131A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6465713A (en) * 1987-09-03 1989-03-13 Fujikura Ltd Manufacture of oxide superconductor
JPH059100A (en) * 1991-06-28 1993-01-19 Nec Corp Synthesis of oxide superconducting thin film
JP2006239705A (en) * 2005-02-28 2006-09-14 Aisin Aw Co Ltd Caulking device and caulking method
US7998883B2 (en) 2000-04-14 2011-08-16 Asm International N.V. Process for producing zirconium oxide thin films

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6465713A (en) * 1987-09-03 1989-03-13 Fujikura Ltd Manufacture of oxide superconductor
JPH059100A (en) * 1991-06-28 1993-01-19 Nec Corp Synthesis of oxide superconducting thin film
US7998883B2 (en) 2000-04-14 2011-08-16 Asm International N.V. Process for producing zirconium oxide thin films
JP2006239705A (en) * 2005-02-28 2006-09-14 Aisin Aw Co Ltd Caulking device and caulking method

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