JPS6425982A - Continuous type ion plating device - Google Patents

Continuous type ion plating device

Info

Publication number
JPS6425982A
JPS6425982A JP18142787A JP18142787A JPS6425982A JP S6425982 A JPS6425982 A JP S6425982A JP 18142787 A JP18142787 A JP 18142787A JP 18142787 A JP18142787 A JP 18142787A JP S6425982 A JPS6425982 A JP S6425982A
Authority
JP
Japan
Prior art keywords
treated
ion plating
ionized
evaporation
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18142787A
Other languages
English (en)
Other versions
JPH0742585B2 (ja
Inventor
Shuichi Okabe
Kazumi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP18142787A priority Critical patent/JPH0742585B2/ja
Publication of JPS6425982A publication Critical patent/JPS6425982A/ja
Publication of JPH0742585B2 publication Critical patent/JPH0742585B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP18142787A 1987-07-21 1987-07-21 連続式イオンプレ−ティング装置 Expired - Lifetime JPH0742585B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18142787A JPH0742585B2 (ja) 1987-07-21 1987-07-21 連続式イオンプレ−ティング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18142787A JPH0742585B2 (ja) 1987-07-21 1987-07-21 連続式イオンプレ−ティング装置

Publications (2)

Publication Number Publication Date
JPS6425982A true JPS6425982A (en) 1989-01-27
JPH0742585B2 JPH0742585B2 (ja) 1995-05-10

Family

ID=16100584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18142787A Expired - Lifetime JPH0742585B2 (ja) 1987-07-21 1987-07-21 連続式イオンプレ−ティング装置

Country Status (1)

Country Link
JP (1) JPH0742585B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5724334A (en) * 1994-11-15 1998-03-03 Nec Corporation Optical head device utilizing super-resolution technique

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5724334A (en) * 1994-11-15 1998-03-03 Nec Corporation Optical head device utilizing super-resolution technique
US5802036A (en) * 1994-11-15 1998-09-01 Nec Corporation Optical head device utilizing super-resolution technique

Also Published As

Publication number Publication date
JPH0742585B2 (ja) 1995-05-10

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