JPS57195751A - Vacuum treatment apparatus - Google Patents
Vacuum treatment apparatusInfo
- Publication number
- JPS57195751A JPS57195751A JP8090581A JP8090581A JPS57195751A JP S57195751 A JPS57195751 A JP S57195751A JP 8090581 A JP8090581 A JP 8090581A JP 8090581 A JP8090581 A JP 8090581A JP S57195751 A JPS57195751 A JP S57195751A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- tapered
- bush
- vacuum treatment
- bolt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
PURPOSE: To enable the titled apparatus for subjecting a plastic to a plasma treatment to correspond to changes in the material of a workpiece, and changes in the pressure of a gas that will be introduced into a vacuum treatment chamber, by making a rodlike electrode have a crank structure in order that the gap between a cathode and an anode can be adjusted.
CONSTITUTION: A drum cathode 16 and an anode 17 having a crank structure and arranged adjacent to the outer periphery with the gap between them adjustable are in the vacuum treatment chamber, and a workpiece will be delivered between the electrodes to be subjected to a plasma treatment. The anode 17 is insulated via an insulating bush 22 and is attached to a side plate 19 by means of a bolt 24. A tapered holder 23 fits in a tapered bush 25, and the tapered bush 25 has a slit 27 extending radially so that the anode 17 can be secured by fastening a forcing bolt 26. By unfastening the forcing bolt 26, the engagement of the anode 17 with the tapered bush 25 is released. By rotating the anode 17, it can be placed in an optimum position as shown in dotted line.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8090581A JPS57195751A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8090581A JPS57195751A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57195751A true JPS57195751A (en) | 1982-12-01 |
JPH0122856B2 JPH0122856B2 (en) | 1989-04-28 |
Family
ID=13731383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8090581A Granted JPS57195751A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57195751A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000120588A (en) * | 1998-10-16 | 2000-04-25 | Nikkiso Co Ltd | Impeller fixing structure of canned motor pump |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5480373A (en) * | 1977-12-08 | 1979-06-27 | Toray Ind Inc | Method of treating high-polymer resin with electrical discharge |
-
1981
- 1981-05-29 JP JP8090581A patent/JPS57195751A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5480373A (en) * | 1977-12-08 | 1979-06-27 | Toray Ind Inc | Method of treating high-polymer resin with electrical discharge |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000120588A (en) * | 1998-10-16 | 2000-04-25 | Nikkiso Co Ltd | Impeller fixing structure of canned motor pump |
Also Published As
Publication number | Publication date |
---|---|
JPH0122856B2 (en) | 1989-04-28 |
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