JPS57195751A - Vacuum treatment apparatus - Google Patents

Vacuum treatment apparatus

Info

Publication number
JPS57195751A
JPS57195751A JP8090581A JP8090581A JPS57195751A JP S57195751 A JPS57195751 A JP S57195751A JP 8090581 A JP8090581 A JP 8090581A JP 8090581 A JP8090581 A JP 8090581A JP S57195751 A JPS57195751 A JP S57195751A
Authority
JP
Japan
Prior art keywords
anode
tapered
bush
vacuum treatment
bolt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8090581A
Other languages
Japanese (ja)
Other versions
JPH0122856B2 (en
Inventor
Kiyoshi Imada
Susumu Ueno
Hideaki Kamata
Masaya Tokai
Yoshitada Hata
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP8090581A priority Critical patent/JPS57195751A/en
Publication of JPS57195751A publication Critical patent/JPS57195751A/en
Publication of JPH0122856B2 publication Critical patent/JPH0122856B2/ja
Granted legal-status Critical Current

Links

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  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

PURPOSE: To enable the titled apparatus for subjecting a plastic to a plasma treatment to correspond to changes in the material of a workpiece, and changes in the pressure of a gas that will be introduced into a vacuum treatment chamber, by making a rodlike electrode have a crank structure in order that the gap between a cathode and an anode can be adjusted.
CONSTITUTION: A drum cathode 16 and an anode 17 having a crank structure and arranged adjacent to the outer periphery with the gap between them adjustable are in the vacuum treatment chamber, and a workpiece will be delivered between the electrodes to be subjected to a plasma treatment. The anode 17 is insulated via an insulating bush 22 and is attached to a side plate 19 by means of a bolt 24. A tapered holder 23 fits in a tapered bush 25, and the tapered bush 25 has a slit 27 extending radially so that the anode 17 can be secured by fastening a forcing bolt 26. By unfastening the forcing bolt 26, the engagement of the anode 17 with the tapered bush 25 is released. By rotating the anode 17, it can be placed in an optimum position as shown in dotted line.
COPYRIGHT: (C)1982,JPO&Japio
JP8090581A 1981-05-29 1981-05-29 Vacuum treatment apparatus Granted JPS57195751A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8090581A JPS57195751A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8090581A JPS57195751A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Publications (2)

Publication Number Publication Date
JPS57195751A true JPS57195751A (en) 1982-12-01
JPH0122856B2 JPH0122856B2 (en) 1989-04-28

Family

ID=13731383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8090581A Granted JPS57195751A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195751A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000120588A (en) * 1998-10-16 2000-04-25 Nikkiso Co Ltd Impeller fixing structure of canned motor pump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480373A (en) * 1977-12-08 1979-06-27 Toray Ind Inc Method of treating high-polymer resin with electrical discharge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480373A (en) * 1977-12-08 1979-06-27 Toray Ind Inc Method of treating high-polymer resin with electrical discharge

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000120588A (en) * 1998-10-16 2000-04-25 Nikkiso Co Ltd Impeller fixing structure of canned motor pump

Also Published As

Publication number Publication date
JPH0122856B2 (en) 1989-04-28

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