JPS6455381A - Plasma treatment device - Google Patents
Plasma treatment deviceInfo
- Publication number
- JPS6455381A JPS6455381A JP21008687A JP21008687A JPS6455381A JP S6455381 A JPS6455381 A JP S6455381A JP 21008687 A JP21008687 A JP 21008687A JP 21008687 A JP21008687 A JP 21008687A JP S6455381 A JPS6455381 A JP S6455381A
- Authority
- JP
- Japan
- Prior art keywords
- electromagnet
- vacuum tank
- treated
- film thickness
- changed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To change a plasma region on a raw film material and to improve the distribution characteristics of film thickness by changing the relative position of a magnet and the raw film material which are arranged on the same central axis by a regulating means. CONSTITUTION:When electric power is fed to an electromagnet 5 provided to a vacuum exhauster 2 from an electric source 6 for a coil, plasma generated in a vacuum tank 1 is trapped. A material 9 to be treated is continuously carried into the vacuum tank 1 and carried out from the vacuum tank 1 via a treating roll 10. In this case, the attitude of the electromagnet 5 is changed via a coil supporting base 18 by operating jack bolts 19 provided to the bottom of a casing 14 and both the electromagnet 5 and a target 7 are relatively tilted. Thereby a plasma region can be changed and the distribution of film thickness stuck on the material 9 to be treated can be uniformized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21008687A JPS6455381A (en) | 1987-08-26 | 1987-08-26 | Plasma treatment device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21008687A JPS6455381A (en) | 1987-08-26 | 1987-08-26 | Plasma treatment device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6455381A true JPS6455381A (en) | 1989-03-02 |
Family
ID=16583587
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21008687A Pending JPS6455381A (en) | 1987-08-26 | 1987-08-26 | Plasma treatment device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6455381A (en) |
-
1987
- 1987-08-26 JP JP21008687A patent/JPS6455381A/en active Pending
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