JPS642437Y2 - - Google Patents
Info
- Publication number
- JPS642437Y2 JPS642437Y2 JP3198687U JP3198687U JPS642437Y2 JP S642437 Y2 JPS642437 Y2 JP S642437Y2 JP 3198687 U JP3198687 U JP 3198687U JP 3198687 U JP3198687 U JP 3198687U JP S642437 Y2 JPS642437 Y2 JP S642437Y2
- Authority
- JP
- Japan
- Prior art keywords
- source unit
- evaporation source
- substrate
- electron gun
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 30
- 230000008020 evaporation Effects 0.000 claims description 29
- 238000001704 evaporation Methods 0.000 claims description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 11
- 230000005484 gravity Effects 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 230000001154 acute effect Effects 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 239000012535 impurity Substances 0.000 description 5
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3198687U JPS642437Y2 (enrdf_load_stackoverflow) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3198687U JPS642437Y2 (enrdf_load_stackoverflow) | 1987-03-06 | 1987-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62147334U JPS62147334U (enrdf_load_stackoverflow) | 1987-09-17 |
| JPS642437Y2 true JPS642437Y2 (enrdf_load_stackoverflow) | 1989-01-20 |
Family
ID=30838233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3198687U Expired JPS642437Y2 (enrdf_load_stackoverflow) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642437Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-03-06 JP JP3198687U patent/JPS642437Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62147334U (enrdf_load_stackoverflow) | 1987-09-17 |
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