JPS642358A - Hetero-junction bipolar transistor - Google Patents
Hetero-junction bipolar transistorInfo
- Publication number
- JPS642358A JPS642358A JP15810087A JP15810087A JPS642358A JP S642358 A JPS642358 A JP S642358A JP 15810087 A JP15810087 A JP 15810087A JP 15810087 A JP15810087 A JP 15810087A JP S642358 A JPS642358 A JP S642358A
- Authority
- JP
- Japan
- Prior art keywords
- base layers
- layer
- impurity concentration
- dopant
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To make injection carriers from an emitter layer to reach to a collector layer by plural repetition in base layers, and to shorten the transit time of the base layers by depositing laminating consisting of low-concentration and high-concentration base layers in specified thickness so that a plurality of electron affinity is reduced in succession in the base layers and forming the emitter layer having small electron affinity onto a deposit.
CONSTITUTION: The upper section of a semi-insulating substrate 1 is partitioned by insulating regions 1a formed by ion-implanting proton, a high concentration layer 2 having impurity concentration at a specified value is shaped, using Si as a dopant, and a collector layer 3 having impurity concentration at a specified value is formed, employing Si as the dopant onto the layer 2. Base layers 4a, 4b having impurity concentration at predetermined low and high values, using Be as a dopant are laminated, and base layers 5a, 5b having impurity concentration at fixed low and high values, employing Be as a dopant are laminated. All emitter layer 6 having impurity concentration at a specified value and a high concentration layer 7 having impurity concentration at a predetermined value, using Si as the dopant are shaped to a fixed pattern in succession.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62158100A JPH0656852B2 (en) | 1987-06-24 | 1987-06-24 | Heterojunction bipolar transistor |
EP87119044A EP0273363B1 (en) | 1986-12-22 | 1987-12-22 | Heterojunction bipolar transistor with ballistic operation |
US07/136,589 US4929997A (en) | 1986-12-22 | 1987-12-22 | Heterojunction bipolar transistor with ballistic operation |
DE8787119044T DE3780284T2 (en) | 1986-12-22 | 1987-12-22 | BIPOLAR HETEROUISITION TRANSISTOR WITH BALLISTIC OPERATION. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62158100A JPH0656852B2 (en) | 1987-06-24 | 1987-06-24 | Heterojunction bipolar transistor |
Publications (3)
Publication Number | Publication Date |
---|---|
JPH012358A JPH012358A (en) | 1989-01-06 |
JPS642358A true JPS642358A (en) | 1989-01-06 |
JPH0656852B2 JPH0656852B2 (en) | 1994-07-27 |
Family
ID=15664302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62158100A Expired - Fee Related JPH0656852B2 (en) | 1986-12-22 | 1987-06-24 | Heterojunction bipolar transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0656852B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4946299A (en) * | 1987-05-13 | 1990-08-07 | Canon Kabushiki Kaisha | Document processing apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63158873A (en) * | 1986-12-22 | 1988-07-01 | Nec Corp | Ballistic hetero-junction bipolar transistor |
-
1987
- 1987-06-24 JP JP62158100A patent/JPH0656852B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63158873A (en) * | 1986-12-22 | 1988-07-01 | Nec Corp | Ballistic hetero-junction bipolar transistor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4946299A (en) * | 1987-05-13 | 1990-08-07 | Canon Kabushiki Kaisha | Document processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0656852B2 (en) | 1994-07-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |