JPS6423206A - Thin film optical waveguide - Google Patents

Abstract

PURPOSE:To stabilize the characteristic even under the environment in which a vibration, an impact and a temperature change occur, by allowing a thin film optical waveguide substrate which is provided an optical waveguide on the surface, and a device substrate provided with a thin film device element, to oppose them each other, and sticking them as one body. CONSTITUTION:A thin film optical waveguide substrate 1 is constituted by providing optical waveguides 3-5 on prescribed positions on the surface of an insulating substrate 13. A rectangular projection 10c of quartz, etc. and a thin film device element 12 to which a filter layer 11 of quartz, etc., which is stuck a dielectric multi-layer film on both its side faces is stuck are provided on prescribed positions on a deice substrate 10 of roughly the same shape as the substrate 13. On the substrate 1, the substrate 10 is superposed so that the element 12 occupies a prescribed position on the optical axis of the waveguides 3-5, and the peripheral parts of both the substrates are fixed by an adhesive agent 7. Accordingly, both the substrates can be assembled easily and the warp of the element 12, etc. do not occur, and even under the environment in which a vibration, an impact and a temperature change occur, the performance can be stabilized.