JPS6422768U - - Google Patents

Info

Publication number
JPS6422768U
JPS6422768U JP11628587U JP11628587U JPS6422768U JP S6422768 U JPS6422768 U JP S6422768U JP 11628587 U JP11628587 U JP 11628587U JP 11628587 U JP11628587 U JP 11628587U JP S6422768 U JPS6422768 U JP S6422768U
Authority
JP
Japan
Prior art keywords
obliquely deposited
light source
monitoring device
deposited film
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11628587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11628587U priority Critical patent/JPS6422768U/ja
Publication of JPS6422768U publication Critical patent/JPS6422768U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11628587U 1987-07-29 1987-07-29 Pending JPS6422768U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11628587U JPS6422768U (enrdf_load_stackoverflow) 1987-07-29 1987-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11628587U JPS6422768U (enrdf_load_stackoverflow) 1987-07-29 1987-07-29

Publications (1)

Publication Number Publication Date
JPS6422768U true JPS6422768U (enrdf_load_stackoverflow) 1989-02-06

Family

ID=31358682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11628587U Pending JPS6422768U (enrdf_load_stackoverflow) 1987-07-29 1987-07-29

Country Status (1)

Country Link
JP (1) JPS6422768U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04135865U (ja) * 1991-06-12 1992-12-17 日産アルテイア株式会社 車両下部洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04135865U (ja) * 1991-06-12 1992-12-17 日産アルテイア株式会社 車両下部洗浄装置

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