JPS6432520U - - Google Patents
Info
- Publication number
- JPS6432520U JPS6432520U JP12789387U JP12789387U JPS6432520U JP S6432520 U JPS6432520 U JP S6432520U JP 12789387 U JP12789387 U JP 12789387U JP 12789387 U JP12789387 U JP 12789387U JP S6432520 U JPS6432520 U JP S6432520U
- Authority
- JP
- Japan
- Prior art keywords
- deposited film
- obliquely deposited
- substrate
- vacuum chamber
- observation holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 210000002858 crystal cell Anatomy 0.000 claims description 3
- 239000004973 liquid crystal related substance Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 4
- 238000012806 monitoring device Methods 0.000 claims 3
- 238000012544 monitoring process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12789387U JPS6432520U (enrdf_load_stackoverflow) | 1987-08-21 | 1987-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12789387U JPS6432520U (enrdf_load_stackoverflow) | 1987-08-21 | 1987-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6432520U true JPS6432520U (enrdf_load_stackoverflow) | 1989-03-01 |
Family
ID=31380732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12789387U Pending JPS6432520U (enrdf_load_stackoverflow) | 1987-08-21 | 1987-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6432520U (enrdf_load_stackoverflow) |
-
1987
- 1987-08-21 JP JP12789387U patent/JPS6432520U/ja active Pending
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