JPS642191B2 - - Google Patents

Info

Publication number
JPS642191B2
JPS642191B2 JP28312785A JP28312785A JPS642191B2 JP S642191 B2 JPS642191 B2 JP S642191B2 JP 28312785 A JP28312785 A JP 28312785A JP 28312785 A JP28312785 A JP 28312785A JP S642191 B2 JPS642191 B2 JP S642191B2
Authority
JP
Japan
Prior art keywords
deposited film
reaction vessel
cvd method
plasma
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28312785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62142784A (ja
Inventor
Shigeru Shirai
Masaya Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP28312785A priority Critical patent/JPS62142784A/ja
Publication of JPS62142784A publication Critical patent/JPS62142784A/ja
Publication of JPS642191B2 publication Critical patent/JPS642191B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP28312785A 1985-12-18 1985-12-18 プラズマｃｖｄ法による堆積膜形成装置 Granted JPS62142784A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28312785A JPS62142784A (ja) 1985-12-18 1985-12-18 プラズマｃｖｄ法による堆積膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28312785A JPS62142784A (ja) 1985-12-18 1985-12-18 プラズマｃｖｄ法による堆積膜形成装置

Publications (2)

Publication Number Publication Date
JPS62142784A JPS62142784A (ja) 1987-06-26
JPS642191B2 true JPS642191B2 (oth) 1989-01-13

Family

ID=17661577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28312785A Granted JPS62142784A (ja) 1985-12-18 1985-12-18 プラズマｃｖｄ法による堆積膜形成装置

Country Status (1)

Country Link
JP (1) JPS62142784A (oth)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115537765B (zh) * 2022-09-27 2024-07-12 盛吉盛(宁波)半导体科技有限公司 等离子体化学气相沉积装置和小尺寸沟槽填充方法

Also Published As

Publication number Publication date
JPS62142784A (ja) 1987-06-26

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