JPS642035U - - Google Patents

Info

Publication number
JPS642035U
JPS642035U JP9136987U JP9136987U JPS642035U JP S642035 U JPS642035 U JP S642035U JP 9136987 U JP9136987 U JP 9136987U JP 9136987 U JP9136987 U JP 9136987U JP S642035 U JPS642035 U JP S642035U
Authority
JP
Japan
Prior art keywords
ozone
reaction treatment
utility
model registration
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9136987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0616891Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987091369U priority Critical patent/JPH0616891Y2/ja
Publication of JPS642035U publication Critical patent/JPS642035U/ja
Application granted granted Critical
Publication of JPH0616891Y2 publication Critical patent/JPH0616891Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP1987091369U 1987-06-16 1987-06-16 オゾン反応処理装置 Expired - Lifetime JPH0616891Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987091369U JPH0616891Y2 (ja) 1987-06-16 1987-06-16 オゾン反応処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987091369U JPH0616891Y2 (ja) 1987-06-16 1987-06-16 オゾン反応処理装置

Publications (2)

Publication Number Publication Date
JPS642035U true JPS642035U (enrdf_load_stackoverflow) 1989-01-09
JPH0616891Y2 JPH0616891Y2 (ja) 1994-05-02

Family

ID=30952091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987091369U Expired - Lifetime JPH0616891Y2 (ja) 1987-06-16 1987-06-16 オゾン反応処理装置

Country Status (1)

Country Link
JP (1) JPH0616891Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015213122A (ja) * 2014-05-02 2015-11-26 東京エレクトロン株式会社 基板処理装置、基板処理方法および記憶媒体

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557564A (en) * 1978-06-30 1980-01-19 Sumitomo Precision Prod Co Ltd Ozonizer
JPS55126506A (en) * 1979-03-23 1980-09-30 Mitsubishi Electric Corp Ozonizer controlling system
JPS5962390A (ja) * 1982-09-30 1984-04-09 Toshiba Corp オゾン発生装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557564A (en) * 1978-06-30 1980-01-19 Sumitomo Precision Prod Co Ltd Ozonizer
JPS55126506A (en) * 1979-03-23 1980-09-30 Mitsubishi Electric Corp Ozonizer controlling system
JPS5962390A (ja) * 1982-09-30 1984-04-09 Toshiba Corp オゾン発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015213122A (ja) * 2014-05-02 2015-11-26 東京エレクトロン株式会社 基板処理装置、基板処理方法および記憶媒体

Also Published As

Publication number Publication date
JPH0616891Y2 (ja) 1994-05-02

Similar Documents

Publication Publication Date Title
GB1366594A (en) Process of and apparatus for treating a liquid such as water with oxidising gas
JPS642035U (enrdf_load_stackoverflow)
EP0043477A3 (de) Verfahren und Vorrichtung zum Betreiben von Verbrennungskraftmaschinen und Verbrennungsanlagen
CN209809892U (zh) 一种火化机烟气一体化处理装置
CA2249581A1 (en) Apparatus for treating air containing hydrogen gas
JPH10101308A (ja) オゾン発生装置
JPS5684688A (en) Terminal treatment of waste water
JPS56162257A (en) Apparatus for feeding oxygen and for ionizing air and fuel in intake manifold and carbureter of internal combustion engine
JPS5481192A (en) Ozone generator
JPS5676223A (en) Dry type deodorizing device
JPS557522A (en) Ozonizer
JPH02110641U (enrdf_load_stackoverflow)
SU794296A1 (ru) Устройство дл сжигани топлива
JPH04100518A (ja) エンジンの排気ガス処理装置
CN208194064U (zh) 挥发性有机物净化装置
CN2432207Y (zh) 臭氧活水机的臭氧发生器
JPS5535919A (en) Filter for exhaust port of electric precipitator
JPS52150797A (en) Ozone generation apparatus
JPS5215479A (en) Apparatus for adsorption and removal of harmful gases
JPS5575785A (en) Regenerating method of ammoniacal nitrogen adsorption bed
JPH02221101A (ja) 酸素精製装置
JPH0176035U (enrdf_load_stackoverflow)
JPS5321076A (en) Gas treating apparatus
SU1049086A1 (ru) Устройство дл очистки отход щих газов или воздуха
JPS6362143U (enrdf_load_stackoverflow)