JPS642035U - - Google Patents

Info

Publication number
JPS642035U
JPS642035U JP9136987U JP9136987U JPS642035U JP S642035 U JPS642035 U JP S642035U JP 9136987 U JP9136987 U JP 9136987U JP 9136987 U JP9136987 U JP 9136987U JP S642035 U JPS642035 U JP S642035U
Authority
JP
Japan
Prior art keywords
ozone
reaction treatment
utility
model registration
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9136987U
Other languages
Japanese (ja)
Other versions
JPH0616891Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987091369U priority Critical patent/JPH0616891Y2/en
Publication of JPS642035U publication Critical patent/JPS642035U/ja
Application granted granted Critical
Publication of JPH0616891Y2 publication Critical patent/JPH0616891Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案のオゾン反応処理装置の一実
施例の概略図である。第２図は、本考案のオゾン
反応処理装置の、オゾン混合ガスの吹き出し口の
配置の一例を示す概略図である。第３図は、反応
器６の縦断面図である。 １：酸素または酸素を含む混合ガスのボンベ、
３ａ，３ｂ，３ｃ，３ｄ：セラミツクスオゾナイ
ザー、４ａ，４ｂ，４ｃ，４ｄ：高圧電源、５：
フイルター、６：反応器、７：バイパスライン、
９ａ，９ｂ：切り換えヴアルブ、１０：吹き出し
口。 FIG. 1 is a schematic diagram of an embodiment of the ozone reaction treatment apparatus of the present invention. FIG. 2 is a schematic diagram showing an example of the arrangement of the ozone mixed gas outlet in the ozone reaction treatment apparatus of the present invention. FIG. 3 is a longitudinal sectional view of the reactor 6. 1: A cylinder of oxygen or a mixed gas containing oxygen,
3a, 3b, 3c, 3d: ceramic ozonizer, 4a, 4b, 4c, 4d: high voltage power supply, 5:
Filter, 6: Reactor, 7: Bypass line,
9a, 9b: switching valve, 10: air outlet.

Claims (1)

【実用新案登録請求の範囲】 (1) 固体表面をオゾンを含有するガスと接触さ
せて反応処理を行うオゾン反応処理装置において
、オゾン発生器は少なくとも内面がセラミツクス
で構成されている複数のオゾン発生器からなり、
これらのオゾン発生器は直列及び／又は並列に接
続されてあり、かつ少なくとも１個のオゾン発生
器の高圧電源回路が独立して開閉可能に設けられ
ていることを特徴とするオゾン反応処理装置。 (2) セラミツクスオゾナイザーと反応器の間に
フイルターを設置したことを特徴とする実用新案
登録の請求範囲第１項に記載のオゾン反応処理装
置。 (3) 実用新案登録の請求範囲第１項又は第２項
に記載のオゾン反応処理装置。 (4) オゾン含有ガスの吹き出し口が、ランダム
に開いていることを特徴とする実用新案登録の請
求範囲第１項又は第２項に記載のオゾン反応処理
装置。[Scope of Claim for Utility Model Registration] (1) In an ozone reaction treatment device that performs reaction treatment by bringing a solid surface into contact with an ozone-containing gas, the ozone generator includes a plurality of ozone generators each having at least an inner surface made of ceramics. Consisting of a vessel,
An ozone reaction treatment apparatus characterized in that these ozone generators are connected in series and/or in parallel, and a high-voltage power supply circuit of at least one ozone generator is provided so as to be able to be opened and closed independently. (2) The ozone reaction treatment apparatus according to claim 1 of the utility model registration, characterized in that a filter is installed between the ceramic ozonizer and the reactor. (3) The ozone reaction treatment device according to claim 1 or 2 of the utility model registration. (4) The ozone reaction treatment apparatus according to claim 1 or 2 of the utility model registration, wherein the ozone-containing gas outlet is randomly opened.
JP1987091369U 1987-06-16 1987-06-16 Ozone reaction processor Expired - Lifetime JPH0616891Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987091369U JPH0616891Y2 (en) 1987-06-16 1987-06-16 Ozone reaction processor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987091369U JPH0616891Y2 (en) 1987-06-16 1987-06-16 Ozone reaction processor

Publications (2)

Publication Number Publication Date
JPS642035U true JPS642035U (en) 1989-01-09
JPH0616891Y2 JPH0616891Y2 (en) 1994-05-02

Family

ID=30952091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987091369U Expired - Lifetime JPH0616891Y2 (en) 1987-06-16 1987-06-16 Ozone reaction processor

Country Status (1)

Country Link
JP (1) JPH0616891Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015213122A (en) * 2014-05-02 2015-11-26 東京エレクトロン株式会社 Substrate processing device, substrate processing method, and storage medium

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557564A (en) * 1978-06-30 1980-01-19 Sumitomo Precision Prod Co Ltd Ozonizer
JPS55126506A (en) * 1979-03-23 1980-09-30 Mitsubishi Electric Corp Ozonizer controlling system
JPS5962390A (en) * 1982-09-30 1984-04-09 Toshiba Corp Ozone generator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557564A (en) * 1978-06-30 1980-01-19 Sumitomo Precision Prod Co Ltd Ozonizer
JPS55126506A (en) * 1979-03-23 1980-09-30 Mitsubishi Electric Corp Ozonizer controlling system
JPS5962390A (en) * 1982-09-30 1984-04-09 Toshiba Corp Ozone generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015213122A (en) * 2014-05-02 2015-11-26 東京エレクトロン株式会社 Substrate processing device, substrate processing method, and storage medium

Also Published As

Publication number Publication date
JPH0616891Y2 (en) 1994-05-02

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