JPS641832B2 - - Google Patents
Info
- Publication number
- JPS641832B2 JPS641832B2 JP54007318A JP731879A JPS641832B2 JP S641832 B2 JPS641832 B2 JP S641832B2 JP 54007318 A JP54007318 A JP 54007318A JP 731879 A JP731879 A JP 731879A JP S641832 B2 JPS641832 B2 JP S641832B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- marker
- line
- counter
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 25
- 230000004044 response Effects 0.000 claims description 5
- 230000001419 dependent effect Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000003550 marker Substances 0.000 description 316
- 230000015654 memory Effects 0.000 description 70
- 101000577938 Xenopus laevis Midkine-B Proteins 0.000 description 23
- 101000577937 Xenopus laevis Midkine-A Proteins 0.000 description 21
- 239000004065 semiconductor Substances 0.000 description 20
- 238000010586 diagram Methods 0.000 description 17
- 238000012937 correction Methods 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000002441 reversible effect Effects 0.000 description 7
- 230000006870 function Effects 0.000 description 6
- 230000000295 complement effect Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000001360 synchronised effect Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/70—Determining position or orientation of objects or cameras
- G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30204—Marker
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/20—Image preprocessing
- G06V10/24—Aligning, centring, orientation detection or correction of the image
- G06V10/245—Aligning, centring, orientation detection or correction of the image by locating a pattern; Special marks for positioning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Image Input (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2803653A DE2803653C3 (de) | 1978-01-27 | 1978-01-27 | Ausrichtvorrichtung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54148326A JPS54148326A (en) | 1979-11-20 |
| JPS641832B2 true JPS641832B2 (US08063081-20111122-C00044.png) | 1989-01-12 |
Family
ID=6030582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP731879A Granted JPS54148326A (en) | 1978-01-27 | 1979-01-26 | Matching and recognizing device |
Country Status (9)
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6016673B2 (ja) * | 1978-12-25 | 1985-04-26 | 川崎重工業株式会社 | サ−ボ系における被検体認識装置 |
| DE2910580C3 (de) * | 1979-03-17 | 1982-01-21 | Texas Instruments Deutschland Gmbh, 8050 Freising | Ausrichtvorrichtung |
| US4450579A (en) * | 1980-06-10 | 1984-05-22 | Fujitsu Limited | Recognition method and apparatus |
| DD158824A1 (de) * | 1980-11-03 | 1983-02-02 | Adelbrecht Schorcht | Anordnung zur automatischen justierung mindestens eines gegenstandes |
| JPS57152073A (en) * | 1981-03-16 | 1982-09-20 | Ando Electric Co Ltd | Original profiling reader |
| US4414573A (en) * | 1981-04-08 | 1983-11-08 | Ampex Corporation | Pattern recognition circuit for reliably distinguishing between different portions of a diascope pattern during video camera setup |
| US4479145A (en) * | 1981-07-29 | 1984-10-23 | Nippon Kogaku K.K. | Apparatus for detecting the defect of pattern |
| US4500968A (en) * | 1982-06-29 | 1985-02-19 | Domtar Inc. | Paper machine wet line control |
| US4550374A (en) * | 1982-11-15 | 1985-10-29 | Tre Semiconductor Equipment Corporation | High speed alignment method for wafer stepper |
| GB2131162B (en) * | 1982-11-27 | 1986-04-30 | Ferranti Plc | Aligning objects |
| JPS59157505A (ja) * | 1983-02-28 | 1984-09-06 | Hitachi Ltd | パタ−ン検査装置 |
| JPS60122304A (ja) * | 1983-11-09 | 1985-06-29 | Shinetsu Eng Kk | 自動寸法測定装置 |
| EP0147493B1 (fr) * | 1983-12-28 | 1988-09-07 | International Business Machines Corporation | Procédé et équipement pour l'alignement automatique d'un objet par rapport à une référence |
| US4688088A (en) * | 1984-04-20 | 1987-08-18 | Canon Kabushiki Kaisha | Position detecting device and method |
| FR2570913B1 (fr) * | 1984-09-24 | 1988-06-10 | Aerospatiale | Procede et dispositif d'aide au positionnement de pieces par superposition d'images |
| JPH0616013B2 (ja) * | 1984-11-22 | 1994-03-02 | 肇産業株式会社 | 自動検査装置 |
| JPH0666241B2 (ja) * | 1985-10-14 | 1994-08-24 | 株式会社日立製作所 | 位置検出方法 |
| US4651203A (en) * | 1985-10-29 | 1987-03-17 | At&T Technologies, Inc. | Video controlled article positioning system |
| US4949390A (en) * | 1987-04-16 | 1990-08-14 | Applied Vision Systems, Inc. | Interconnect verification using serial neighborhood processors |
| US4896206A (en) * | 1987-12-14 | 1990-01-23 | Electro Science Industries, Inc. | Video detection system |
| US4998005A (en) * | 1989-05-15 | 1991-03-05 | General Electric Company | Machine vision system |
| US5113565A (en) | 1990-07-06 | 1992-05-19 | International Business Machines Corp. | Apparatus and method for inspection and alignment of semiconductor chips and conductive lead frames |
| US5097602A (en) * | 1990-07-09 | 1992-03-24 | Westinghouse Electric Corp. | Apparatus and method for automated inspection of a surface contour on a workpiece |
| JPH0724278B2 (ja) * | 1991-01-10 | 1995-03-15 | 信越半導体株式会社 | パターンシフト測定方法 |
| US7843510B1 (en) | 1998-01-16 | 2010-11-30 | Ecole Polytechnique Federale De Lausanne | Method and system for combining video sequences with spatio-temporal alignment |
| US6320624B1 (en) | 1998-01-16 | 2001-11-20 | ECOLE POLYTECHNIQUE FéDéRALE | Method and system for combining video sequences with spatio-temporal alignment |
| CA2392530A1 (en) * | 1999-11-24 | 2001-05-31 | Inmotion Technologies Ltd. | Coordination and combination of video sequences with spatial and temporal normalization |
| CH694931A5 (de) * | 2000-03-17 | 2005-09-15 | Esec Trading Sa | Einrichtung fuer die Montage von Halbleiterchips auf einem Substrat. |
| US7392287B2 (en) | 2001-03-27 | 2008-06-24 | Hemisphere Ii Investment Lp | Method and apparatus for sharing information using a handheld device |
| US7112812B2 (en) * | 2001-12-28 | 2006-09-26 | Applied Materials, Inc. | Optical measurement apparatus |
| DE102006003228A1 (de) * | 2006-01-24 | 2007-08-02 | Sick Ag | Vorrichtung zur Überwachung eines Schutzfeldes |
| JP6534316B2 (ja) * | 2015-08-25 | 2019-06-26 | 日機装株式会社 | 漏血検出装置およびそれを用いた漏血検出方法 |
| KR102566136B1 (ko) | 2016-10-14 | 2023-08-10 | 삼성전자주식회사 | 계측 시스템 및 이를 사용하는 스테이지 제어 장치 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3515877A (en) * | 1965-12-13 | 1970-06-02 | John W Massing | Electro-optical positioner |
| US3562423A (en) * | 1967-08-15 | 1971-02-09 | Univ Northwestern | Dictorial tracking and recognition system which provides display of target identified by brilliance and spatial characteristics |
| CA968439A (en) * | 1971-05-26 | 1975-05-27 | Western Electric Company, Incorporated | Video controlled positioning method and apparatus |
| US3899634A (en) * | 1971-05-26 | 1975-08-12 | Western Electric Co | Video controlled positioning method and apparatus |
| GB1401179A (en) * | 1971-09-22 | 1975-07-16 | Image Analysing Computers Ltd | Automated image analysis employing automatic fucussing |
| JPS5214112B2 (US08063081-20111122-C00044.png) * | 1973-02-22 | 1977-04-19 | ||
| US3814845A (en) * | 1973-03-01 | 1974-06-04 | Bell Telephone Labor Inc | Object positioning |
| JPS5425782B2 (US08063081-20111122-C00044.png) * | 1973-03-28 | 1979-08-30 | ||
| US3870814A (en) * | 1973-09-11 | 1975-03-11 | Mosler Safe Co | Image positioning apparatus and method |
| US3903363A (en) * | 1974-05-31 | 1975-09-02 | Western Electric Co | Automatic positioning system and method |
| US3958740A (en) * | 1974-07-08 | 1976-05-25 | Dixon Automation, Inc. | Automatic component assembly machine and method relating thereto |
| US3988535A (en) * | 1975-11-04 | 1976-10-26 | Western Electric Company, Inc. | Automated positioning |
| US4041286A (en) * | 1975-11-20 | 1977-08-09 | The Bendix Corporation | Method and apparatus for detecting characteristic features of surfaces |
| JPS52140278A (en) * | 1976-05-19 | 1977-11-22 | Hitachi Ltd | Position detector |
| CH643959A5 (de) * | 1978-04-14 | 1984-06-29 | Siemens Ag | Verfahren und vorrichtung zur automatischen lageerkennung von halbleiterchips. |
| US4253111A (en) * | 1978-09-25 | 1981-02-24 | Gca Corporation | Apparatus for bonding leads to semiconductor chips |
-
1978
- 1978-01-27 DE DE2803653A patent/DE2803653C3/de not_active Expired
- 1978-06-22 CH CH684378A patent/CH611059A5/xx not_active IP Right Cessation
-
1979
- 1979-01-15 GB GB7901379A patent/GB2013365B/en not_active Expired
- 1979-01-24 FR FR7901746A patent/FR2434535B1/fr not_active Expired
- 1979-01-25 ES ES477151A patent/ES477151A1/es not_active Expired
- 1979-01-26 JP JP731879A patent/JPS54148326A/ja active Granted
- 1979-01-26 PT PT7969143A patent/PT69143A/pt unknown
- 1979-01-26 IT IT47798/79A patent/IT1114484B/it active
-
1980
- 1980-01-28 US US06/115,659 patent/US4352125A/en not_active Expired - Lifetime
- 1980-06-30 US US06/164,717 patent/US4364086A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB2013365B (en) | 1982-08-18 |
| DE2803653A1 (de) | 1979-08-02 |
| US4364086A (en) | 1982-12-14 |
| JPS54148326A (en) | 1979-11-20 |
| ES477151A1 (es) | 1979-07-01 |
| DE2803653B2 (de) | 1980-06-04 |
| FR2434535A1 (fr) | 1980-03-21 |
| IT1114484B (it) | 1986-01-27 |
| GB2013365A (en) | 1979-08-08 |
| FR2434535B1 (fr) | 1986-06-27 |
| IT7947798A0 (it) | 1979-01-26 |
| CH611059A5 (US08063081-20111122-C00044.png) | 1979-05-15 |
| US4352125A (en) | 1982-09-28 |
| DE2803653C3 (de) | 1986-05-28 |
| PT69143A (en) | 1979-02-01 |
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