JPS6418159U - - Google Patents

Info

Publication number
JPS6418159U
JPS6418159U JP1988086985U JP8698588U JPS6418159U JP S6418159 U JPS6418159 U JP S6418159U JP 1988086985 U JP1988086985 U JP 1988086985U JP 8698588 U JP8698588 U JP 8698588U JP S6418159 U JPS6418159 U JP S6418159U
Authority
JP
Japan
Prior art keywords
substrate
reaction tube
vertical
growth
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988086985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235814Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988086985U priority Critical patent/JPH0235814Y2/ja
Publication of JPS6418159U publication Critical patent/JPS6418159U/ja
Application granted granted Critical
Publication of JPH0235814Y2 publication Critical patent/JPH0235814Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1988086985U 1988-06-30 1988-06-30 Expired JPH0235814Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988086985U JPH0235814Y2 (enExample) 1988-06-30 1988-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988086985U JPH0235814Y2 (enExample) 1988-06-30 1988-06-30

Publications (2)

Publication Number Publication Date
JPS6418159U true JPS6418159U (enExample) 1989-01-30
JPH0235814Y2 JPH0235814Y2 (enExample) 1990-09-28

Family

ID=31311622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988086985U Expired JPH0235814Y2 (enExample) 1988-06-30 1988-06-30

Country Status (1)

Country Link
JP (1) JPH0235814Y2 (enExample)

Also Published As

Publication number Publication date
JPH0235814Y2 (enExample) 1990-09-28

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