JPS6417449A - Formation of bump electrode of semiconductor device - Google Patents

Formation of bump electrode of semiconductor device

Info

Publication number
JPS6417449A
JPS6417449A JP62172290A JP17229087A JPS6417449A JP S6417449 A JPS6417449 A JP S6417449A JP 62172290 A JP62172290 A JP 62172290A JP 17229087 A JP17229087 A JP 17229087A JP S6417449 A JPS6417449 A JP S6417449A
Authority
JP
Japan
Prior art keywords
bump electrode
solder
electrical plating
resist film
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62172290A
Other languages
English (en)
Inventor
Hisashi Shirahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP62172290A priority Critical patent/JPS6417449A/ja
Publication of JPS6417449A publication Critical patent/JPS6417449A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/11Manufacturing methods

Landscapes

  • Wire Bonding (AREA)
JP62172290A 1987-07-10 1987-07-10 Formation of bump electrode of semiconductor device Pending JPS6417449A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62172290A JPS6417449A (en) 1987-07-10 1987-07-10 Formation of bump electrode of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62172290A JPS6417449A (en) 1987-07-10 1987-07-10 Formation of bump electrode of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6417449A true JPS6417449A (en) 1989-01-20

Family

ID=15939185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62172290A Pending JPS6417449A (en) 1987-07-10 1987-07-10 Formation of bump electrode of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6417449A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02244722A (ja) * 1989-03-17 1990-09-28 Casio Comput Co Ltd 半導体素子のバンプ電極形成方法
JPH0346233A (ja) * 1989-07-13 1991-02-27 Sharp Corp バンプの製造方法
JPH05228983A (ja) * 1992-02-25 1993-09-07 Mitsuba Seisakusho:Kk 押出機への発泡用注入ガス制御装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5365663A (en) * 1976-11-24 1978-06-12 Nec Corp Manufacture of semiconductor device
JPS62266851A (ja) * 1986-05-14 1987-11-19 Nec Corp 半田バンプ電極の形成方法
JPS63119551A (ja) * 1986-11-07 1988-05-24 Toshiba Corp パタ−ニングされた金属膜の形成方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5365663A (en) * 1976-11-24 1978-06-12 Nec Corp Manufacture of semiconductor device
JPS62266851A (ja) * 1986-05-14 1987-11-19 Nec Corp 半田バンプ電極の形成方法
JPS63119551A (ja) * 1986-11-07 1988-05-24 Toshiba Corp パタ−ニングされた金属膜の形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02244722A (ja) * 1989-03-17 1990-09-28 Casio Comput Co Ltd 半導体素子のバンプ電極形成方法
JPH0346233A (ja) * 1989-07-13 1991-02-27 Sharp Corp バンプの製造方法
JPH05228983A (ja) * 1992-02-25 1993-09-07 Mitsuba Seisakusho:Kk 押出機への発泡用注入ガス制御装置

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