JPS641671B2 - - Google Patents
Info
- Publication number
- JPS641671B2 JPS641671B2 JP2038285A JP2038285A JPS641671B2 JP S641671 B2 JPS641671 B2 JP S641671B2 JP 2038285 A JP2038285 A JP 2038285A JP 2038285 A JP2038285 A JP 2038285A JP S641671 B2 JPS641671 B2 JP S641671B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- gas
- lantern ring
- sealing device
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 38
- 238000007789 sealing Methods 0.000 claims description 22
- 239000011261 inert gas Substances 0.000 claims description 7
- 238000010926 purge Methods 0.000 claims description 7
- 238000012856 packing Methods 0.000 description 10
- 210000004907 gland Anatomy 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 231100000989 no adverse effect Toxicity 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Landscapes
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Sealing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2038285A JPS61178579A (ja) | 1985-02-05 | 1985-02-05 | 往復動ガス圧縮機の軸封部ガス洩れ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2038285A JPS61178579A (ja) | 1985-02-05 | 1985-02-05 | 往復動ガス圧縮機の軸封部ガス洩れ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61178579A JPS61178579A (ja) | 1986-08-11 |
| JPS641671B2 true JPS641671B2 (zh) | 1989-01-12 |
Family
ID=12025485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2038285A Granted JPS61178579A (ja) | 1985-02-05 | 1985-02-05 | 往復動ガス圧縮機の軸封部ガス洩れ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61178579A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63205498A (ja) * | 1987-02-19 | 1988-08-24 | サ−モカタリチツク コ−ポレ−シヨン | 送風機 |
| JPH0494914U (zh) * | 1990-12-28 | 1992-08-18 | ||
| JP6577343B2 (ja) * | 2015-11-17 | 2019-09-18 | 株式会社日本製鋼所 | ラビリンスピストン式往復動圧縮機 |
-
1985
- 1985-02-05 JP JP2038285A patent/JPS61178579A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61178579A (ja) | 1986-08-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |