JPS641671B2 - - Google Patents
Info
- Publication number
- JPS641671B2 JPS641671B2 JP2038285A JP2038285A JPS641671B2 JP S641671 B2 JPS641671 B2 JP S641671B2 JP 2038285 A JP2038285 A JP 2038285A JP 2038285 A JP2038285 A JP 2038285A JP S641671 B2 JPS641671 B2 JP S641671B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- gas
- lantern ring
- sealing device
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 38
- 238000007789 sealing Methods 0.000 claims description 22
- 239000011261 inert gas Substances 0.000 claims description 7
- 238000010926 purge Methods 0.000 claims description 7
- 238000012856 packing Methods 0.000 description 10
- 210000004907 gland Anatomy 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 231100000989 no adverse effect Toxicity 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Landscapes
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Sealing Devices (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、特に活性化ガスを圧縮する往復動ガ
ス圧縮機の軸封部ガス洩れ処理装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention particularly relates to a gas leak treatment device for a shaft seal of a reciprocating gas compressor that compresses activated gas.
従来の技術及び発明が解決しようとする問題点
従来、活性化ガス、例えば、水素を含むIC半
導体製造用原料ガスの圧縮に使用される往復動ガ
ス圧縮機では、軸封部のガス洩れがあると、大気
に接して固形粉末を生じ、これがピストンロツド
に附着し、また、クランクオイルに接して油の劣
化を促進し、固形異物を生成するなど運転の障害
と圧縮機寿命の短縮を来す欠点を有していた。Problems to be Solved by the Prior Art and the Invention Conventionally, in reciprocating gas compressors used to compress raw material gases for IC semiconductor manufacturing that contain activated gases such as hydrogen, there has been gas leakage from the shaft seal. When exposed to the atmosphere, solid powder is generated, which adheres to the piston rod, and when in contact with crank oil, accelerates oil deterioration and generates solid foreign matter, resulting in operational problems and shortened compressor life. It had
本発明は、上記問題点を解決する往復動ガス圧
縮機の軸封部ガス洩れ処理装置を提供するもので
ある。 The present invention provides a gas leak treatment device for a shaft seal of a reciprocating gas compressor that solves the above problems.
すなわち、本発明装置は、第１図に示すよう
に、シリンダ１０とクランクケース４０との間に
密封箱を形成したデイスタンスピースを２室２０
及び３０を設け、第１室２０に被圧縮ガスに障害
を及ぼさないガスを前記シリンダ１０の吸入圧力
よりやや高い圧力で封入すると共に、前記シリン
ダ１０と前記第１室２０との間にランタンリング
５１を介在せしめたオイルレス軸封装置５０を設
けて、前記軸封装置５０を通じて前記シリンダ１
０側又は前記第１室２０側に漏洩しようとするガ
スを、前記ランタンリング５１により吸入弁１０
１入口側１０２に連通し、第２室３０に不活性ガ
スを大気圧より高く前記第１室２０の封入ガスよ
り低い圧力で封入すると共に、前記第１室２０と
前記第２室３０との間にランタンリング６１を介
在せしめたオイルレス軸封装置６０を設けて、前
記軸封装置６０を通じて前記第２室側３０又は前
記第１室２０側に漏洩しようとするガスを、前記
ランタンリング６１に吹き込んだ前記不活性ガス
により、前記ランタンリング６１から外部のパー
ジタンク９６に大気圧より高く前記第２室３０の
封入ガスより低い圧力で放出できるようにしてな
るものである。 That is, as shown in FIG.
and 30, the first chamber 20 is filled with gas that does not harm the compressed gas at a pressure slightly higher than the suction pressure of the cylinder 10, and a lantern ring is provided between the cylinder 10 and the first chamber 20. 51 is provided, and the cylinder 1 is
Gas that is about to leak to the zero side or the first chamber 20 side is removed from the suction valve 10 by the lantern ring 51.
1 inlet side 102, and inert gas is sealed in the second chamber 30 at a pressure higher than atmospheric pressure and lower than the gas sealed in the first chamber 20, and the first chamber 20 and the second chamber 30 are connected to each other. An oilless shaft sealing device 60 with a lantern ring 61 interposed therebetween is provided to prevent gas that is about to leak to the second chamber side 30 or the first chamber 20 side through the shaft sealing device 60 to the lantern ring 61. The inert gas blown into the lantern ring 61 can be discharged from the lantern ring 61 to the external purge tank 96 at a pressure higher than atmospheric pressure and lower than the gas sealed in the second chamber 30.
本発明において、シリンダ１０と第１室２０と
の間に設けられたオイルレス軸封装置５０は、第
２図及び第３図に示すように、複数個のケーシン
グ５２内に嵌合したグランドパツキン５３，５
４，５５からなる公知の軸封装置の前記グランド
パツキン間にランタンリング５１を介在せしめた
もので、ランタンリング５１は、グランドパツキ
ン間にピストンロツド１２を取り囲む空間５１０
を形成し、前記空間５１０を外部と連通した連通
管５０１に連通できるようにしたリングである。 In the present invention, the oilless shaft sealing device 50 provided between the cylinder 10 and the first chamber 20 includes a gland packing fitted inside a plurality of casings 52, as shown in FIGS. 2 and 3. 53,5
A lantern ring 51 is interposed between the gland packings of a known shaft sealing device consisting of 4 and 55, and the lantern ring 51 has a space 510 surrounding the piston rod 12 between the gland packings.
This is a ring that allows the space 510 to communicate with a communication pipe 501 that communicates with the outside.
また、第１室２０と第２室３０との間に設けら
れたオイルレス軸封装置６０は、第４図に示すよ
うに、複数個のケーシング６２内に嵌合したグラ
ンドパツキン６３からなる公知の軸封装置の前記
グランドパツキン間にランタンリング６１を介在
せしめたもので、ランタンリング６１は、前述し
たランタンリング５１と同一構成のものである。 Further, the oil-less shaft sealing device 60 provided between the first chamber 20 and the second chamber 30 is a known oil-less shaft sealing device consisting of a gland packing 63 fitted in a plurality of casings 62, as shown in FIG. A lantern ring 61 is interposed between the gland packings of the shaft sealing device, and the lantern ring 61 has the same structure as the lantern ring 51 described above.
作用及び発明の効果
従つて、今、例えば前述したIC半導体製造用
ガスを圧縮する場合、第１室２０に例えば水素ガ
ス８００をシリンダ１０の吸入圧力よりやや高い
圧力で封入し、第２室３０に例えば窒素ガス９０
０を大気圧より高く第１室の封入ガス８００より
低い圧力で封入し、また、不活性ガス９００を軸
封装置６０のランタンリング６１に吹き込んでバ
ージタリンク９６へ大気圧より高く第２室の封入
ガス８００より低い圧力で放出すれば、軸封装置
５０を通じてシリンダ１０側又は第１室２０側に
漏洩しようとするガスは、ランタンリング５１に
より吹入弁入口１０２側に流入する。この場合、
第１室２０内のガスは被圧縮ガスに障害を及ぼさ
ないガス（水素ガス）であるので、これが吸入弁
入口１０２側に流入しても悪影響は全くない。次
に、軸封装置６０を通じて第１室２０から第２室
３０又は第２室３０から第１室２０に流入しよう
とするガスは、ランタンリング６１に吹き込んだ
不活性ガス（窒素ガス）によりパージタンク９６
に放出される。なお、公知の軸封装置７０から第
２室３０と大気圧下のクランクケース室４０に漏
洩するガスは不活性ガス（窒素）であるので悪影
響は全くない。Operation and Effects of the Invention Therefore, for example, when compressing the above-mentioned IC semiconductor manufacturing gas, for example, hydrogen gas 800 is sealed in the first chamber 20 at a pressure slightly higher than the suction pressure of the cylinder 10, and the second chamber 30 is For example, nitrogen gas 90
0 is sealed at a pressure higher than atmospheric pressure and lower than the sealed gas 800 in the first chamber, and an inert gas 900 is blown into the lantern ring 61 of the shaft sealing device 60 to flow into the vergetor link 96 at a pressure higher than atmospheric pressure in the second chamber. If the gas is released at a pressure lower than that of the sealed gas 800, the gas that is about to leak to the cylinder 10 side or the first chamber 20 side through the shaft sealing device 50 flows into the injection valve inlet 102 side by the lantern ring 51. in this case,
Since the gas in the first chamber 20 is a gas (hydrogen gas) that does not harm the compressed gas, there is no adverse effect at all even if it flows into the intake valve inlet 102 side. Next, the gas that is about to flow from the first chamber 20 to the second chamber 30 or from the second chamber 30 to the first chamber 20 through the shaft sealing device 60 is purged by an inert gas (nitrogen gas) blown into the lantern ring 61. tank 96
is released. Note that since the gas leaking from the known shaft sealing device 70 into the second chamber 30 and the crankcase chamber 40 under atmospheric pressure is an inert gas (nitrogen), there is no adverse effect at all.
以上のように、活性化している被圧縮ガスであ
つても、大気やクランクケース油に直接接触しな
いので固形異物を生成したりクランクオイル油の
劣化を来すことはない。 As described above, even if the compressed gas is activated, it does not come into direct contact with the atmosphere or crankcase oil, so it does not generate solid foreign matter or cause deterioration of the crankcase oil.
実施例
第１図乃至第４図に示す往復動ガス圧縮機は、
水素を含むIC半導体原料ガスの圧縮に使用され
るものである。１０はシリンダ、１１はピスト
ン、１０１は吸入弁、１０３は吐出弁、２０はデ
イスタンスピース第１室、５０はシリンダ１０と
第１室２０との間の軸封装置で、５２はパツキン
ケース、５３，５４，５５はグランドパツキン、
５３１，５４１，５５１はグランドパツキン押え
のコイルバネ、５１は円柱５１１にロツド１２よ
りやや大きい中心孔５１２を設けると共に外周面
に外溝５１４、内周面に内溝５１３を設け、その
間に適当数の貫通孔５１５を設けたランタンリン
グ、５０１はランタンリング５１の外溝５１４と
吸入弁１０１の入口１０２とを連通する連通管、
３０はジスタンスピース第２室、６０は第１室２
０と第２室３０との間の軸封装置で、６２はパツ
キンケース、６３はグランドパツキン、６３１は
グランドパツキン押えのコイルバネ、６１は円６
１１にロツド１２よりやや大きい中心孔６１２を
設けると共に外周面に外溝６１４、内周面に内溝
６１３を設け、その間に適当数の貫通孔６１５を
設けたランタンリング、６０１はランタンリング
６１の外溝６１４と後記開閉弁９５とを連通する
連通管、６０２はランタンリング６１の外溝６１
４と後記パージタンク９６とを連通する連通管、
４０はクランクケース室、７０は第２室６０とク
ランクケース室４０との間の軸封装置、８０は水
素ガス８００を開閉弁８１、減圧弁８２、開閉弁
８３、流量計８４を経て第１室２０に封入する水
素ガス封入装置、８５は第１室２０の圧力計、９
０は窒素ガス９００を開閉弁９１、減圧弁９２、
開閉弁９３、流量計９４を経て、第２室に封入す
ると共に流量計９４の出口側から開閉弁９５及び
連通管６０１を経て軸封装置６０のランタンリン
グ６１に連通すると共にランタンリング６１から
パージタンク９６に連通する窒素ガス封入及び吹
込装置、９６は軸封装置６０のランタンリング６
１と連通するパージタンク、９７はパージタンク
の圧力計、９８は第２室３０の圧力計である。吸
入圧力は1.9Kg／cm2Ｇ、吐出圧力は7.0Kg／cm2Ｇ、
第１室２０の室内圧力1.9Kg／cm2Ｇ、第２室３０
の室内圧力1.0Kg／cm2Ｇ、パージタンク圧力は0.3
Kg／cm2Ｇ、流量計８５の水素ガス流量は２〜20N
／分、流量計９４の窒素ガス流量は２〜20N
／分である。Embodiment The reciprocating gas compressor shown in FIGS. 1 to 4 is
It is used to compress IC semiconductor raw material gas containing hydrogen. 10 is a cylinder, 11 is a piston, 101 is a suction valve, 103 is a discharge valve, 20 is a distance piece first chamber, 50 is a shaft sealing device between the cylinder 10 and the first chamber 20, 52 is a packing case, 53, 54, 55 are Grand Patsukin,
Reference numerals 531, 541, and 551 are coil springs for holding down the gland packing, and 51 is a cylinder 511 with a center hole 512 that is slightly larger than the rod 12, an outer groove 514 on the outer circumferential surface, an inner groove 513 on the inner circumferential surface, and an appropriate number of holes in between. A lantern ring provided with a through hole 515; 501 is a communication pipe that communicates the outer groove 514 of the lantern ring 51 with the inlet 102 of the suction valve 101;
30 is the resistance piece 2nd chamber, 60 is the 1st chamber 2
0 and the second chamber 30, 62 is a packing case, 63 is a gland packing, 631 is a coil spring for holding the gland packing, and 61 is a circle 6.
11 is provided with a center hole 612 that is slightly larger than the rod 12, an outer groove 614 is provided on the outer circumferential surface, an inner groove 613 is provided on the inner circumferential surface, and an appropriate number of through holes 615 are provided between them. A communication pipe 602 communicates the outer groove 614 with the on-off valve 95 described later, and 602 is the outer groove 61 of the lantern ring 61.
4 and a purge tank 96 described below,
40 is a crankcase chamber, 70 is a shaft sealing device between the second chamber 60 and the crankcase chamber 40, and 80 is a hydrogen gas 800 that passes through an on-off valve 81, a pressure reducing valve 82, an on-off valve 83, and a flow meter 84, and then passes through the first A hydrogen gas filling device for filling the chamber 20, 85 a pressure gauge for the first chamber 20, 9
0 is a nitrogen gas 900 on-off valve 91, pressure reducing valve 92,
The gas is sealed into the second chamber via the on-off valve 93 and the flow meter 94, and is communicated from the outlet side of the flow meter 94 to the lantern ring 61 of the shaft sealing device 60 via the on-off valve 95 and the communication pipe 601, and is purged from the lantern ring 61. A nitrogen gas filling and blowing device communicating with the tank 96, 96 is the lantern ring 6 of the shaft sealing device 60.
1, a purge tank 97 is a pressure gauge of the purge tank, and 98 is a pressure gauge of the second chamber 30. Suction pressure is 1.9Kg/cm 2 G, discharge pressure is 7.0Kg/cm 2 G,
Indoor pressure in the first chamber 20: 1.9Kg/cm 2 G, second chamber 30
The indoor pressure is 1.0Kg/ cm2G , and the purge tank pressure is 0.3
Kg/cm 2 G, hydrogen gas flow rate of flowmeter 85 is 2 to 20N
/min, nitrogen gas flow rate of flowmeter 94 is 2 to 20N
/minute.
図面は、本発明の実施例を示し、第１図は全体
概略説明図、第２図はシリンダとデイスタンスピ
ース第１室との間の軸封装置の断面図、第３図は
ランタンリングの拡大斜視図、第４図はデイスタ
ンスピース第１室と第２室との間の軸封装置の断
面図である。
１０……シリンダ、１０１……吸入弁、１０２
……同入口、２０……第１室、３０……第２室、
４０……クランクケース、５０，６０……オイル
レス軸封装置、５１，６１……ランタンリング、
９６……パージタンク。
The drawings show an embodiment of the present invention; FIG. 1 is a general schematic explanatory diagram, FIG. 2 is a cross-sectional view of the shaft sealing device between the cylinder and the first chamber of the distance piece, and FIG. 3 is a diagram of the lantern ring. The enlarged perspective view, FIG. 4, is a sectional view of the shaft sealing device between the first chamber and the second chamber of the distance piece. 10...Cylinder, 101...Suction valve, 102
...Same entrance, 20...Room 1, 30...Room 2,
40... Crank case, 50, 60... Oil-less shaft sealing device, 51, 61... Lantern ring,
96...Purge tank.
Claims (1)
形成したデイスタンスピースを２室設け、第１室
に被圧縮ガスに障害を及ぼさないガスを前記シリ
ンダの吸入圧力よりやや高い圧力で封入すると共
に、前記シリンダと前記第１室との間にランタン
リングを介在せしめたオイルレス軸封装置を設け
て、前記軸封装置を通じて前記シリンダ側又は前
記第１室側に漏洩しようとするガスを、前記ラン
タンリングにより吸入弁入口側に連通し、第２室
に不活性ガスを大気圧より高く前記第１室の封入
ガスより低い圧力で封入すると共に、前記第１室
と前記第２室との間にランタンリングを介在せし
めたオイルレス軸封装置を設けて、前記軸封装置
を通じて前記第２室側又は前記第１室側に漏洩し
ようとするガスを、前記ランタンリングに吹き込
んだ前記不活性ガスにより、前記ランタンリング
から外部のパージタンクに大気圧より高く前記第
２室の封入ガスより低い圧力で放出できるように
したことを特徴とする往復動ガス圧縮機の軸封部
ガス洩れ処理装置。1. Two distance pieces forming a sealed box are provided between the cylinder and the crankcase, and the first chamber is filled with gas that does not harm the compressed gas at a pressure slightly higher than the suction pressure of the cylinder, An oilless shaft sealing device having a lantern ring interposed between the cylinder and the first chamber is provided to prevent gas that is about to leak to the cylinder side or the first chamber side through the shaft sealing device to the lantern. The ring communicates with the inlet side of the suction valve, and inert gas is sealed in the second chamber at a pressure higher than atmospheric pressure and lower than the gas filled in the first chamber, and between the first chamber and the second chamber. An oil-less shaft sealing device with a lantern ring interposed therebetween is provided, and gas that is about to leak into the second chamber side or the first chamber side through the shaft sealing device is controlled by the inert gas blown into the lantern ring. A gas leak treatment device for a shaft seal of a reciprocating gas compressor, characterized in that gas can be discharged from the lantern ring to an external purge tank at a pressure higher than atmospheric pressure and lower than the gas sealed in the second chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2038285A JPS61178579A (en) | 1985-02-05 | 1985-02-05 | Gas-leak processing apparatus for shaft seal part of reciprocating gas compressor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2038285A JPS61178579A (en) | 1985-02-05 | 1985-02-05 | Gas-leak processing apparatus for shaft seal part of reciprocating gas compressor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61178579A JPS61178579A (en) | 1986-08-11 |
| JPS641671B2 true JPS641671B2 (en) | 1989-01-12 |
Family
ID=12025485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2038285A Granted JPS61178579A (en) | 1985-02-05 | 1985-02-05 | Gas-leak processing apparatus for shaft seal part of reciprocating gas compressor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61178579A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63205498A (en) * | 1987-02-19 | 1988-08-24 | サ−モカタリチツク コ−ポレ−シヨン | Air blower |
| JPH0494914U (en) * | 1990-12-28 | 1992-08-18 | ||
| JP6577343B2 (en) * | 2015-11-17 | 2019-09-18 | 株式会社日本製鋼所 | Labyrinth piston reciprocating compressor |
-
1985
- 1985-02-05 JP JP2038285A patent/JPS61178579A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61178579A (en) | 1986-08-11 |
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| LAPS | Cancellation because of no payment of annual fees |