JPS61178579A - Gas-leak processing apparatus for shaft seal part of reciprocating gas compressor - Google Patents

Abstract

PURPOSE:To prevent the formation of solid foreign articles by supplying the gas which does not give an influence to working fluid and inert gas into the shaft seal apparatus of a reciprocating compressor for compressing inert gas, thus preventing the leak of the working fluid and direct contact of the fluid with the atmosphere or crankcase oil. CONSTITUTION:Two distance piece chambers 20 and 30 forming sealed boxes are arranged, and oilless shaft seal apparatuses 50 and 60 are arranged. The gas 800 which does not give an influence to the working fluid as the working fluid is supplied under the pressure a little higher than the suction pressure into the first chamber 20, and the inert gas 900 such as nitrogen gas is supplied under the pressure a little lower than the pressure in the first chamber 20 into the second chamber 30. While, the lantern ring 51 of one oilless shaft seal apparatus 50 is connected to the suction side 102 of a compressor, and nitrogen gas is supplied into the lantern ring 51 of the other shaft seal apparatus 60, which is further connected to a purge tank 96.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates in particular to a gas leak treatment device for a shaft seal of a reciprocating gas compressor for compressing activated gas.

Conventional techniques and problems to be solved by the invention Conventionally, reciprocating gas compressors used for compressing raw material gas for IC semiconductor manufacturing containing activated gas, such as hydrogen,
If there is a gas leak from the shaft seal, it will come into contact with the atmosphere and form solid powder, which will stick to the piston rod, and will also come into contact with the crank oil and accelerate oil deterioration, producing solid foreign matter and causing operational problems. This had the disadvantage of shortening the life of the compressor.

The present invention provides a gas leak treatment device for a shaft seal of a reciprocating gas compressor that solves the above problems.

That is, as shown in FIG. 1, the device of the present invention has two distance pieces 20 and 80 that form a sealed box between the cylinder 10 and the crankcase 40, and the first chamber 20 is filled with liquid compressed gas. A non-hazardous gas is sealed at a pressure slightly higher than the suction pressure of the cylinder 10, and
An oil-less shaft seal device 50 with a lantern ring 51 interposed between the cylinder 10 and the first chamber 20 is provided to allow leakage to the cylinder 10 side or the first chamber 20 side through the shaft seal group RF50. The lantern ring 51 communicates the gas to the intake valve 101 and the population side 102, and the second chamber 30 is filled with an inert gas at a pressure higher than atmospheric pressure (lower than the gas filled in the first chamber 20). A lanthanum ring 61 is interposed between the first chamber 20 and the second chamber 80.
The inert gas blown into the lantern ring 61 can be discharged from the lantern ring 61 to the external purge tank 96 at a pressure higher than atmospheric pressure and lower than the gas sealed in the second chamber 80.

In the present invention, the oil-less shaft sealing device 50 provided between the cylinder 10 and @1 chamber 20 includes a gland packing fitted into a plurality of casings 52, as shown in FIGS. 2 and 8. A lantern ring 51 is interposed between the gland packings of a known shaft sealing device consisting of 5B, 54.degree. This is a ring made like this.

The oil-less shaft seal [60] provided between the first chamber 20 and the second chamber 80 is a known oil-free shaft seal [60] consisting of a gland packing 6a fitted in a plurality of casings 62, as shown in FIG. A lantern ring 61 is interposed between the gland packings of the shaft sealing device.
1 has the same configuration as the lantern ring 51 described above.

Operation and Effect of the Invention Therefore, now, for example, when compressing the above-mentioned IC semiconductor manufacturing gas, for example, hydrogen gas 800 is sealed in the first chamber 20 at a pressure slightly higher than the suction pressure of the cylinder 10, and the second chamber 80 is filled with hydrogen gas 800, For example, nitrogen gas 900 is sealed at a pressure higher than atmospheric pressure and lower than the sealed gas 800 in the first chamber, and inert gas 900 is blown into the lantern ring 61 of the shaft sealing device 160 to the persita link 96 at a pressure higher than atmospheric pressure. If the gas is released at a pressure lower than that of the sealed gas 800 in the second chamber, the shaft sealing device 50
The gas that is about to leak to the cylinder 10 side or the first chamber 20 side through the lantern ring 51 is
It flows into the 02 side. In this case, the gas in the first chamber 20 is a gas (hydrogen gas) that does not interfere with the liquid compressed gas, so even if it flows into the intake valve inlet 102 side, there will be no adverse effect. Since the gas leaking into the crankcase chamber 4o is a small amount of inert gas (nitrogen), there is no adverse effect at all.

As described above, even if the liquid compressible gas is activated, it does not come into direct contact with the atmosphere or crankcase oil, so it does not generate solid foreign matter or cause deterioration of the crankcase oil.

This is used for compression in Example m-. , 10 is a cylinder, 11 is a piston, 101 is a suction valve, 108 is a discharge valve,
20 is the distance piece first chamber, 50 is the cylinder 10
and the first chamber 20, 52 is a packing case, 58, 54.

55 is a gland packing, 511, 541.551 is a coil spring for holding the gland packing, 61 is a lantern ring having a center hole 512 slightly larger than the rod 12 in a cylinder 511, and 501 is an outer groove 514 of the lantern ring 51 and an inlet valve A communication pipe that communicates with the inlet 102, 80 the second chamber of the resistance piece, 60 the first chamber 20 and the second m8
0, 62 is a packing case, 63 is a gland packing, 681 is a coil spring for holding the gland packing, 61 is a cylinder 611 with a center hole 612 slightly larger than the rod 12, and an outer groove 614 on the outer peripheral surface. , a lantern ring with an inner groove 611 on the inner peripheral surface and an appropriate number of through holes 4 between them, a case chamber, and 70 a shaft seal between the second chamber 60 and the crankcase chamber 40. 80 is a hydrogen gas filling device for sealing hydrogen gas 800 into the first chamber 20 via an on-off valve 81, a pressure reducing valve 82, an on-off valve 83, and a flow meter 84; 85 is a pressure gauge for the first chamber 20; 9
0 indicates a nitrogen gas 900, an on-off valve 91, a pressure reducing valve 92, an on-off valve 9B, a flow meter device, 96 a purge tank communicating with the lantern ring 61 of the shaft seal device 60, 97 a purge tank pressure gauge, and 98 a second chamber 30. This is a pressure gauge. The suction pressure is 1.9 kq, 1g, and the discharge pressure is 7.0 kQ/d.
G, the indoor pressure of the first chamber 20 is 1.9 to 9G, the second chamber 8o
Indoor pressure of 1.0 kQ/d G, purge tank pressure i
, t O, 8kQ/c4 G, the hydrogen gas flow rate of the flowmeter 85 is 2 to 2°ONg/+, and the nitrogen gas flowrate of the flowmeter 94 is 2 to 2ONlZ.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention; FIG. 1 is a general schematic explanatory diagram, FIG. 2 is a sectional view of the shaft sealing device between the cylinder and the first chamber of the distance piece, and FIG. 8 is an enlarged view of the lantern ring. The perspective view and FIG. 4 are cross-sectional views of the shaft sealing device between the first and second distance piece chambers.

Claims (1)

[Claims] Two distance pieces forming sealed boxes are provided between the cylinder and the crankcase, and the first chamber is filled with gas that does not interfere with the liquid compressed gas at a pressure slightly higher than the suction pressure of the cylinder. An oilless shaft sealing device having a lantern ring interposed between the shaft sealing device and the first chamber is provided, and the lantern ring prevents gas that is about to leak to the cylinder side or the first chamber side through the shaft sealing device. A lantern ring is connected to the inlet side of the suction valve, and a second chamber is filled with an inert gas at a pressure higher than atmospheric pressure and lower than the gas filled in the first chamber, and a lantern ring is provided between the first chamber and the second chamber. An oil-less shaft sealing device is provided, and the oil-less shaft sealing device is provided with a
The inert gas blown into the lantern ring allows the gas that is about to leak to the chamber side to be released from the lantern ring to an external purge tank at a pressure higher than atmospheric pressure and lower than the gas sealed in the second chamber. A gas leak treatment device for a shaft seal of a reciprocating gas compressor, which is characterized by: