JPS6415155U - - Google Patents

Info

Publication number
JPS6415155U
JPS6415155U JP10981087U JP10981087U JPS6415155U JP S6415155 U JPS6415155 U JP S6415155U JP 10981087 U JP10981087 U JP 10981087U JP 10981087 U JP10981087 U JP 10981087U JP S6415155 U JPS6415155 U JP S6415155U
Authority
JP
Japan
Prior art keywords
rays
sample
image
fluorescent screen
electron beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10981087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10981087U priority Critical patent/JPS6415155U/ja
Publication of JPS6415155U publication Critical patent/JPS6415155U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10981087U 1987-07-17 1987-07-17 Pending JPS6415155U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10981087U JPS6415155U (enrdf_load_stackoverflow) 1987-07-17 1987-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10981087U JPS6415155U (enrdf_load_stackoverflow) 1987-07-17 1987-07-17

Publications (1)

Publication Number Publication Date
JPS6415155U true JPS6415155U (enrdf_load_stackoverflow) 1989-01-25

Family

ID=31346397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10981087U Pending JPS6415155U (enrdf_load_stackoverflow) 1987-07-17 1987-07-17

Country Status (1)

Country Link
JP (1) JPS6415155U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166847A (ja) * 1984-02-10 1985-08-30 Kawasaki Steel Corp Ｘ線コツセル回折像解析装置
JPS61151449A (ja) * 1984-12-26 1986-07-10 Hitachi Ltd 電子線回折装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166847A (ja) * 1984-02-10 1985-08-30 Kawasaki Steel Corp Ｘ線コツセル回折像解析装置
JPS61151449A (ja) * 1984-12-26 1986-07-10 Hitachi Ltd 電子線回折装置

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