JPS6413743A - Superconductive wiring structure - Google Patents

Superconductive wiring structure

Info

Publication number
JPS6413743A
JPS6413743A JP62168719A JP16871987A JPS6413743A JP S6413743 A JPS6413743 A JP S6413743A JP 62168719 A JP62168719 A JP 62168719A JP 16871987 A JP16871987 A JP 16871987A JP S6413743 A JPS6413743 A JP S6413743A
Authority
JP
Japan
Prior art keywords
superconductive
wiring
conductive material
layer
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62168719A
Other languages
Japanese (ja)
Inventor
Shigeru Kawamata
Yutaka Misawa
Naohiro Monma
Atsushi Numata
Tetsuya Tomobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Power Semiconductor Device Ltd
Original Assignee
Hitachi Ltd
Hitachi Haramachi Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Haramachi Electronics Ltd filed Critical Hitachi Ltd
Priority to JP62168719A priority Critical patent/JPS6413743A/en
Publication of JPS6413743A publication Critical patent/JPS6413743A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Abstract

PURPOSE:To form a highly reliable superconductive wiring suitable for wirings of semiconductor or other devices by making the superconductive wiring consist of a pair of wiring sections, one of which is formed by a superconductive material and the other is formed by a low specific resistance, normal conductive material such as Al and Cu. CONSTITUTION:A LOCOS oxide film 20 is formed onto a semiconductor substrate 10, wherein a source and a drain are formed. A superconductive gate electrode 30 formed by a low specific resistance, normal conductive material, such as Al conductive material 50 and an oxide superconductive layer 60, such as (La1-x'Srx)2CuO4-y, formed thereon, and a lead electrode of a superconductive wiring 40 are formed, extending from the source and the drain, onto the LOCOS oxide film and a gate oxide film. A second superconductive wiring layer 41 is likewise formed thereon with an interlayer insulating film 70 as a separator. An insulating film 71 is formed on the topmost layer. A connecting element in a through hole section which connects the first wiring layer 40 to the second wiring layer 41 is a laminated film consisting of a superconductive material and a normal conductive material such as Al, and is connected to the same material as the superconductive wirings 40 and 41.
JP62168719A 1987-07-08 1987-07-08 Superconductive wiring structure Pending JPS6413743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62168719A JPS6413743A (en) 1987-07-08 1987-07-08 Superconductive wiring structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62168719A JPS6413743A (en) 1987-07-08 1987-07-08 Superconductive wiring structure

Publications (1)

Publication Number Publication Date
JPS6413743A true JPS6413743A (en) 1989-01-18

Family

ID=15873174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62168719A Pending JPS6413743A (en) 1987-07-08 1987-07-08 Superconductive wiring structure

Country Status (1)

Country Link
JP (1) JPS6413743A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6445146A (en) * 1987-08-13 1989-02-17 Semiconductor Energy Lab Manufacture of superconducting device
JPS6445145A (en) * 1987-08-13 1989-02-17 Semiconductor Energy Lab Superconducting device
JPS6461931A (en) * 1987-09-02 1989-03-08 Toshiba Corp Semiconductor device
JPH0199242A (en) * 1987-09-09 1989-04-18 American Teleph & Telegr Co <Att> Semiconductor device having mutual connection of superconductor
JPH01123438A (en) * 1987-11-07 1989-05-16 Mitsubishi Electric Corp Superconducting wiring integrated circuit
US5418384A (en) * 1992-03-11 1995-05-23 Sharp Kabushiki Kaisha Light-source device including a linear array of LEDs
WO2003091339A1 (en) 2002-04-24 2003-11-06 Asahi Kasei Chemicals Corporation Asphalt composition
JP2008282754A (en) * 2007-05-14 2008-11-20 Akita Denshi Systems:Kk Illumination device and manufacturing method therefor
US9620487B2 (en) 2012-12-10 2017-04-11 Apple Inc. Light emitting device reflective bank structure

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6445146A (en) * 1987-08-13 1989-02-17 Semiconductor Energy Lab Manufacture of superconducting device
JPS6445145A (en) * 1987-08-13 1989-02-17 Semiconductor Energy Lab Superconducting device
JPS6461931A (en) * 1987-09-02 1989-03-08 Toshiba Corp Semiconductor device
JPH0199242A (en) * 1987-09-09 1989-04-18 American Teleph & Telegr Co <Att> Semiconductor device having mutual connection of superconductor
JPH01123438A (en) * 1987-11-07 1989-05-16 Mitsubishi Electric Corp Superconducting wiring integrated circuit
US5418384A (en) * 1992-03-11 1995-05-23 Sharp Kabushiki Kaisha Light-source device including a linear array of LEDs
WO2003091339A1 (en) 2002-04-24 2003-11-06 Asahi Kasei Chemicals Corporation Asphalt composition
JP2008282754A (en) * 2007-05-14 2008-11-20 Akita Denshi Systems:Kk Illumination device and manufacturing method therefor
US9620487B2 (en) 2012-12-10 2017-04-11 Apple Inc. Light emitting device reflective bank structure
US10043784B2 (en) 2012-12-10 2018-08-07 Apple Inc. Light emitting device reflective bank structure
US10784236B2 (en) 2012-12-10 2020-09-22 Apple Inc. Light emitting device reflective bank structure
US11373986B2 (en) 2012-12-10 2022-06-28 Apple Inc. Light emitting device reflective bank structure

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