JPH01123438A - Superconducting wiring integrated circuit - Google Patents

Abstract

PURPOSE:To prevent the generation of an erroneous operation due to the deviation of timing between signals by a method wherein a superconducting wiring is formed in two layer structure composed of the wiring, consisting of a superconducting material, and the substance having excellent heat conductivity, and the temperature distribution of a superconducting wiring part is uniformly maintained. CONSTITUTION:A superconducting wiring 30 is formed into the double-layer structure composed of a wiring 3 made of a superconducting material and the substance 5 such as a metal having the excellent heat conductivity. The temperature distribution of the wiring 3 is uniformly maintained by the substance 5, and the temperature distribution of the wiring 3 is uniformly maintained even when the temperature of an element is raised by the Joule heat of the element. The generation of the phenomenon, in which a part of the wiring 30 is extremely heated up locally, can be prevented. As a result, the erroneous operation generated by the deviation in timing between signals can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a superconducting wiring integrated circuit having a wiring portion formed of a superconducting material.

[Conventional technology]

In large-scale integrated circuits such as semiconductor memory devices, as the degree of integration increases, the proportion of delay in wiring to the total delay increases. Therefore, in large-scale integrated circuits, forming the wiring portion from a superconducting material is considered to be very advantageous in terms of increasing the speed of the device. In other words, the electrical resistance of superconducting materials becomes 0 Ω below the critical temperature, so when an element whose wiring part is made of superconducting material is operated below the critical temperature, the CR time constant of the wiring part becomes O, and the wiring delay completely disappears.

In Fig. 2, which shows an example of a case where a superconducting material is used as wiring, 1 is a semiconductor substrate, 2 is an insulator, 3 is a superconducting wiring, and 4 is a wiring made of a conductor having contact with the superconducting wiring 3. be.

Generally, Joule heating during operation of an integrated circuit device is localized. Therefore, the temperature distribution of the wiring within the element is also not uniform. Therefore, even in the case of an integrated circuit having a single-layer superconducting wiring structure as shown in FIG. 2, it is thought that as the element temperature rises, the superconducting material forming the wiring becomes locally hot.

When that temperature exceeds the critical temperature of the superconducting material, that part turns into a resistor, causing a local signal delay in that part, causing a timing shift between signals within the element, which can lead to malfunction. I'll wake you up.

[Problem that the invention seeks to solve]

Conventional superconducting interconnect integrated circuits are configured as described above, so when the temperature rises due to the Joule heat generation of the element itself during operation and the superconducting material forming the interconnect locally exceeds the critical temperature, that part will Since the element is replaced by a resistor, a local signal delay occurs in that part, causing a timing shift between signals within the element, which may cause malfunction.

This invention was made in order to solve the above-mentioned problems, and the superconducting material forming the wiring part is made of superconducting material that does not exceed the critical temperature even if the element temperature rises due to Joule heat generation during the operation of the element. The purpose is to provide wiring integrated circuits.

[Means for solving problems]

The superconducting wiring integrated circuit according to the present invention has a 2N structure wiring including wiring made of a superconducting material and a material having good thermal conductivity such as metal.

[Effect]

The superconducting wiring integrated circuit according to the present invention has a 2N structure in which the superconducting wiring is made of a superconducting material and a substance with good thermal conductivity such as metal, so that the temperature of the superconducting material forming the wiring can be locally reduced. The critical temperature will not be exceeded, there will be no timing deviation between signals within the device, and malfunctions can be prevented.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing a superconducting wiring integrated circuit according to an embodiment of the present invention. In the figure, 1 is a semiconductor substrate, 2 is an insulator, and 30 is a superconducting wiring part 3 and a material 5 with good thermal conductivity.
Superconducting wiring configured with a layered structure, 4 is superconducting wiring part 3
This is wiring using an electric shock body that has a contact with.

In this embodiment, the superconducting wiring 30 has a 2N structure consisting of the superconducting wiring part 3 and the good thermal conductor 5, so that the good thermal conductor 5 keeps the temperature distribution of the superconducting wiring part 3 uniform, and during the operation of the element,
Even if the element temperature rises due to Joule heat generation in the element, the temperature distribution of the superconducting wiring can be kept more uniform, and it is possible to avoid a phenomenon in which a part of the superconducting wiring becomes locally extremely hot. Therefore, the temperature of the superconducting material forming the wiring does not locally exceed the critical temperature, there is no timing shift between signals within the device, and malfunctions can be prevented.

〔Effect of the invention〕

As described above, according to the superconducting wiring integrated circuit according to the present invention, the superconducting wiring has a two-layer structure of the wiring made of a superconducting material and the material having good thermal conductivity such as metal, so that the superconducting wiring Therefore, the temperature of the superconducting wiring section can be prevented from exceeding the critical temperature locally, and a part of the superconducting wiring section locally turns into a resistor. This has the effect of preventing malfunctions due to timing shifts between signals caused by this.

[Brief explanation of the drawing]

Fig. 1 is a diagram of a superconducting wiring integrated circuit according to an embodiment of the present invention, and Fig. 2 is a diagram of a conventional superconducting wiring integrated circuit. Conductor wiring, 5 is a material with good thermal conductivity, and 30 is superconducting wiring. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

[Claims] (1) An integrated circuit having wiring formed of a superconducting material, characterized in that the superconducting wiring has a two-layer structure of wiring made of a superconducting material and a substance with good thermal conductivity.