JPS6412329B2 - - Google Patents

Info

Publication number
JPS6412329B2
JPS6412329B2 JP9949881A JP9949881A JPS6412329B2 JP S6412329 B2 JPS6412329 B2 JP S6412329B2 JP 9949881 A JP9949881 A JP 9949881A JP 9949881 A JP9949881 A JP 9949881A JP S6412329 B2 JPS6412329 B2 JP S6412329B2
Authority
JP
Japan
Prior art keywords
diaphragm
pressure sensor
capsule
pressure
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9949881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58731A (ja
Inventor
Osamu Makino
Tooru Ishida
Seiji Oikawa
Jun Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9949881A priority Critical patent/JPS58731A/ja
Publication of JPS58731A publication Critical patent/JPS58731A/ja
Publication of JPS6412329B2 publication Critical patent/JPS6412329B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP9949881A 1981-06-25 1981-06-25 静電容量式圧力センサ Granted JPS58731A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9949881A JPS58731A (ja) 1981-06-25 1981-06-25 静電容量式圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9949881A JPS58731A (ja) 1981-06-25 1981-06-25 静電容量式圧力センサ

Publications (2)

Publication Number Publication Date
JPS58731A JPS58731A (ja) 1983-01-05
JPS6412329B2 true JPS6412329B2 (de) 1989-02-28

Family

ID=14248948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9949881A Granted JPS58731A (ja) 1981-06-25 1981-06-25 静電容量式圧力センサ

Country Status (1)

Country Link
JP (1) JPS58731A (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0435778Y2 (de) * 1985-10-11 1992-08-25
JPS63228038A (ja) * 1985-11-26 1988-09-22 Nippon Denso Co Ltd 半導体圧力変換器
JPS62170538U (de) * 1986-04-18 1987-10-29
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
JPS62292137A (ja) * 1986-06-11 1987-12-18 株式会社　シグナル　テクノロジ− 血圧測定器
US4888662A (en) * 1988-12-08 1989-12-19 Texas Instruments Incorporated High pressure package for pressure transducers
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
DE10043630A1 (de) * 2000-09-01 2002-03-14 Endress Hauser Gmbh Co Druckmeßzelle
JP3346379B2 (ja) * 2000-09-21 2002-11-18 三菱電機株式会社 角速度センサおよびその製造方法
JP2007502416A (ja) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク 容量型センサ
JP2010197057A (ja) * 2009-02-23 2010-09-09 Kyocera Corp 圧力検出装置用基体および圧力検出装置
DE102012222089A1 (de) 2012-12-03 2014-06-05 Robert Bosch Gmbh Drucksensormodul

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4178621A (en) * 1978-01-23 1979-12-11 Motorola, Inc. Electromechanical pressure transducer

Also Published As

Publication number Publication date
JPS58731A (ja) 1983-01-05

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