JPS6411684A - Method and device for cleaning sample carrying-in chamber - Google Patents

Method and device for cleaning sample carrying-in chamber

Info

Publication number
JPS6411684A
JPS6411684A JP16682187A JP16682187A JPS6411684A JP S6411684 A JPS6411684 A JP S6411684A JP 16682187 A JP16682187 A JP 16682187A JP 16682187 A JP16682187 A JP 16682187A JP S6411684 A JPS6411684 A JP S6411684A
Authority
JP
Japan
Prior art keywords
chamber
leak gas
sample
carried
evacuating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16682187A
Other languages
English (en)
Inventor
Yutaka Kakehi
Yoichi Ito
Yoshinao Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16682187A priority Critical patent/JPS6411684A/ja
Publication of JPS6411684A publication Critical patent/JPS6411684A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP16682187A 1987-07-06 1987-07-06 Method and device for cleaning sample carrying-in chamber Pending JPS6411684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16682187A JPS6411684A (en) 1987-07-06 1987-07-06 Method and device for cleaning sample carrying-in chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16682187A JPS6411684A (en) 1987-07-06 1987-07-06 Method and device for cleaning sample carrying-in chamber

Publications (1)

Publication Number Publication Date
JPS6411684A true JPS6411684A (en) 1989-01-17

Family

ID=15838289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16682187A Pending JPS6411684A (en) 1987-07-06 1987-07-06 Method and device for cleaning sample carrying-in chamber

Country Status (1)

Country Link
JP (1) JPS6411684A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6817057B2 (en) * 2001-08-30 2004-11-16 Micron Technology, Inc. Spindle chuck cleaner
JP2022552225A (ja) * 2019-10-08 2022-12-15 ラム リサーチ コーポレーション 基板処理システムにおけるロードロックのための自動クリーニング

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042831A (ja) * 1983-08-19 1985-03-07 Toshiba Corp 半導体製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042831A (ja) * 1983-08-19 1985-03-07 Toshiba Corp 半導体製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6817057B2 (en) * 2001-08-30 2004-11-16 Micron Technology, Inc. Spindle chuck cleaner
JP2022552225A (ja) * 2019-10-08 2022-12-15 ラム リサーチ コーポレーション 基板処理システムにおけるロードロックのための自動クリーニング

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