JPS6411132B2 - - Google Patents

Info

Publication number
JPS6411132B2
JPS6411132B2 JP139783A JP139783A JPS6411132B2 JP S6411132 B2 JPS6411132 B2 JP S6411132B2 JP 139783 A JP139783 A JP 139783A JP 139783 A JP139783 A JP 139783A JP S6411132 B2 JPS6411132 B2 JP S6411132B2
Authority
JP
Japan
Prior art keywords
pinhole
elliptical
light
reflecting mirror
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP139783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59126231A (ja
Inventor
Yoshiharu Oosaki
Teruaki Shigeta
Shigeru Horii
Hideo Nishama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP139783A priority Critical patent/JPS59126231A/ja
Publication of JPS59126231A publication Critical patent/JPS59126231A/ja
Publication of JPS6411132B2 publication Critical patent/JPS6411132B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/57Measuring gloss

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP139783A 1983-01-07 1983-01-07 樋形反射鏡の反射面の光沢検査装置 Granted JPS59126231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP139783A JPS59126231A (ja) 1983-01-07 1983-01-07 樋形反射鏡の反射面の光沢検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP139783A JPS59126231A (ja) 1983-01-07 1983-01-07 樋形反射鏡の反射面の光沢検査装置

Publications (2)

Publication Number Publication Date
JPS59126231A JPS59126231A (ja) 1984-07-20
JPS6411132B2 true JPS6411132B2 (enrdf_load_stackoverflow) 1989-02-23

Family

ID=11500353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP139783A Granted JPS59126231A (ja) 1983-01-07 1983-01-07 樋形反射鏡の反射面の光沢検査装置

Country Status (1)

Country Link
JP (1) JPS59126231A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248853U (enrdf_load_stackoverflow) * 1988-09-30 1990-04-04

Also Published As

Publication number Publication date
JPS59126231A (ja) 1984-07-20

Similar Documents

Publication Publication Date Title
US5633721A (en) Surface position detection apparatus
JP5388543B2 (ja) 外観検査装置
KR20110016400A (ko) 측정 장치, 노광 장치 및 디바이스 제조 방법
CN102087483B (zh) 一种用于投影光刻中焦面检测的光学系统
CN111157541B (zh) 光学检测系统以及光学检测方法
US6023333A (en) Device and method for optical detection of the deformation of a surface
JPS6411132B2 (enrdf_load_stackoverflow)
EP0051899B1 (en) Apparatus for automatically detecting and evaluating the characteristics of prints
JPS58120106A (ja) 半導体ウエハの外観検査装置
Capstaff et al. A compact motion picture densitometer
JPH1172443A (ja) 自動マクロ検査装置
JPH043495B2 (enrdf_load_stackoverflow)
JPH0383462A (ja) 情報支持物によって散乱される光を測定するための装置
JP4635939B2 (ja) 表面検査装置
JP3040131B2 (ja) 球体表面の傷検査装置
JPH05280929A (ja) 面位置検出装置及びこれを有する露光装置
JPH11260689A (ja) 均一光学系、パターン検査装置及びパターン検査方法
US3765310A (en) Optical system
JPS6038167Y2 (ja) 計測用照明装置
JPH03130639A (ja) Mtf測定装置の光軸整合方法
JP2001165868A (ja) 円筒表面検査装置及び検査方法
US7190383B2 (en) Misalignment detector and image forming apparatus
JPH08297096A (ja) 透明板状体の品質検査装置
JPH0719950A (ja) 画像濃度検知装置
JPS6088344A (ja) レンズの偏心測定機