JPS6410110B2 - - Google Patents

Info

Publication number
JPS6410110B2
JPS6410110B2 JP56073590A JP7359081A JPS6410110B2 JP S6410110 B2 JPS6410110 B2 JP S6410110B2 JP 56073590 A JP56073590 A JP 56073590A JP 7359081 A JP7359081 A JP 7359081A JP S6410110 B2 JPS6410110 B2 JP S6410110B2
Authority
JP
Japan
Prior art keywords
resistance
layer
pressure sensor
diaphragm
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56073590A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57188885A (en
Inventor
Kazuji Yamada
Kyomitsu Suzuki
Motohisa Nishihara
Satoshi Shimada
Hideo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56073590A priority Critical patent/JPS57188885A/ja
Publication of JPS57188885A publication Critical patent/JPS57188885A/ja
Publication of JPS6410110B2 publication Critical patent/JPS6410110B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP56073590A 1981-05-18 1981-05-18 Semiconductor pressure sensor Granted JPS57188885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56073590A JPS57188885A (en) 1981-05-18 1981-05-18 Semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56073590A JPS57188885A (en) 1981-05-18 1981-05-18 Semiconductor pressure sensor

Publications (2)

Publication Number Publication Date
JPS57188885A JPS57188885A (en) 1982-11-19
JPS6410110B2 true JPS6410110B2 (en:Method) 1989-02-21

Family

ID=13522675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56073590A Granted JPS57188885A (en) 1981-05-18 1981-05-18 Semiconductor pressure sensor

Country Status (1)

Country Link
JP (1) JPS57188885A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174374A (ja) * 1984-09-19 1986-04-16 Toyota Central Res & Dev Lab Inc 半導体圧力変換器
JPH0758795B2 (ja) * 1985-01-28 1995-06-21 日本電気株式会社 圧力センサ

Also Published As

Publication number Publication date
JPS57188885A (en) 1982-11-19

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