JPS6410085B2 - - Google Patents

Info

Publication number

JPS6410085B2

JPS6410085B2 JP57128120A JP12812082A JPS6410085B2 JP S6410085 B2 JPS6410085 B2 JP S6410085B2 JP 57128120 A JP57128120 A JP 57128120A JP 12812082 A JP12812082 A JP 12812082A JP S6410085 B2 JPS6410085 B2 JP S6410085B2

Authority

JP

Japan

Prior art keywords

oxide

mol

laminate

substrate

nonlinear resistor

Prior art date

1982-07-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

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• XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 38
• 238000010304 firing Methods 0.000 claims description 24
• 239000000758 substrate Substances 0.000 claims description 24
• 229910000428 cobalt oxide Inorganic materials 0.000 claims description 11
• IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 claims description 11
• QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 6
• 238000000034 method Methods 0.000 claims description 6
• 238000004519 manufacturing process Methods 0.000 claims description 5
• 239000000843 powder Substances 0.000 claims description 5
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
• 229910000416 bismuth oxide Inorganic materials 0.000 claims description 4
• TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims description 4
• 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 3
• WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 3
• 229910052744 lithium Inorganic materials 0.000 claims description 3
• MMKQUGHLEMYQSG-UHFFFAOYSA-N oxygen(2-);praseodymium(3+) Chemical compound [O-2].[O-2].[O-2].[Pr+3].[Pr+3] MMKQUGHLEMYQSG-UHFFFAOYSA-N 0.000 claims description 3
• ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
• 229910052787 antimony Inorganic materials 0.000 claims description 2
• WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 2
• 229910052796 boron Inorganic materials 0.000 claims description 2
• 238000010030 laminating Methods 0.000 claims description 2
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 2
• 229910052759 nickel Inorganic materials 0.000 claims description 2
• 229910003447 praseodymium oxide Inorganic materials 0.000 claims description 2
• 239000011787 zinc oxide Substances 0.000 claims 5
• 238000010438 heat treatment Methods 0.000 claims 2
• AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims 2
• 238000003825 pressing Methods 0.000 claims 2
• 229910052777 Praseodymium Inorganic materials 0.000 claims 1
• 229910000410 antimony oxide Inorganic materials 0.000 claims 1
• 229910052788 barium Inorganic materials 0.000 claims 1
• DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims 1
• 229910052797 bismuth Inorganic materials 0.000 claims 1
• JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
• 229910052810 boron oxide Inorganic materials 0.000 claims 1
• 229910017052 cobalt Inorganic materials 0.000 claims 1
• 239000010941 cobalt Substances 0.000 claims 1
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
• KAGOZRSGIYZEKW-UHFFFAOYSA-N cobalt(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Co+3].[Co+3] KAGOZRSGIYZEKW-UHFFFAOYSA-N 0.000 claims 1
• JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims 1
• XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical group [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 claims 1
• FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims 1
• 229910001947 lithium oxide Inorganic materials 0.000 claims 1
• VASIZKWUTCETSD-UHFFFAOYSA-N manganese(II) oxide Inorganic materials [Mn]=O VASIZKWUTCETSD-UHFFFAOYSA-N 0.000 claims 1
• 229910000480 nickel oxide Inorganic materials 0.000 claims 1
• VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 claims 1
• GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims 1
• PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 claims 1
• 230000000694 effects Effects 0.000 description 9
• 229910044991 metal oxide Inorganic materials 0.000 description 8
• 150000004706 metal oxides Chemical class 0.000 description 8
• 239000000203 mixture Substances 0.000 description 6
• 239000004065 semiconductor Substances 0.000 description 6
• 230000004888 barrier function Effects 0.000 description 3
• 239000000463 material Substances 0.000 description 3
• 230000000630 rising effect Effects 0.000 description 3
• 239000000654 additive Substances 0.000 description 2
• 239000000853 adhesive Substances 0.000 description 2
• 230000001070 adhesive effect Effects 0.000 description 2
• 230000000052 comparative effect Effects 0.000 description 2
• 238000003475 lamination Methods 0.000 description 2
• 239000003960 organic solvent Substances 0.000 description 2
• 239000002245 particle Substances 0.000 description 2
• 238000005245 sintering Methods 0.000 description 2
• 238000004544 sputter deposition Methods 0.000 description 2
• -1 Co 2 O 3 Inorganic materials 0.000 description 1
• 229910020599 Co 3 O 4 Inorganic materials 0.000 description 1
• GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
• 229910018068 Li 2 O Inorganic materials 0.000 description 1
• 230000002159 abnormal effect Effects 0.000 description 1
• 239000006096 absorbing agent Substances 0.000 description 1
• 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 238000005336 cracking Methods 0.000 description 1
• 229910052733 gallium Inorganic materials 0.000 description 1
• 238000005498 polishing Methods 0.000 description 1
• 239000011148 porous material Substances 0.000 description 1
• 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
• 230000003313 weakening effect Effects 0.000 description 1