JPS6398728U - - Google Patents

Info

Publication number
JPS6398728U
JPS6398728U JP1986194509U JP19450986U JPS6398728U JP S6398728 U JPS6398728 U JP S6398728U JP 1986194509 U JP1986194509 U JP 1986194509U JP 19450986 U JP19450986 U JP 19450986U JP S6398728 U JPS6398728 U JP S6398728U
Authority
JP
Japan
Prior art keywords
plasma generation
microwave
transport pipe
plasma
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986194509U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441172Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986194509U priority Critical patent/JPH0441172Y2/ja
Publication of JPS6398728U publication Critical patent/JPS6398728U/ja
Application granted granted Critical
Publication of JPH0441172Y2 publication Critical patent/JPH0441172Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP1986194509U 1986-12-19 1986-12-19 Expired JPH0441172Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986194509U JPH0441172Y2 (enrdf_load_stackoverflow) 1986-12-19 1986-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986194509U JPH0441172Y2 (enrdf_load_stackoverflow) 1986-12-19 1986-12-19

Publications (2)

Publication Number Publication Date
JPS6398728U true JPS6398728U (enrdf_load_stackoverflow) 1988-06-27
JPH0441172Y2 JPH0441172Y2 (enrdf_load_stackoverflow) 1992-09-28

Family

ID=31151549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986194509U Expired JPH0441172Y2 (enrdf_load_stackoverflow) 1986-12-19 1986-12-19

Country Status (1)

Country Link
JP (1) JPH0441172Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法

Also Published As

Publication number Publication date
JPH0441172Y2 (enrdf_load_stackoverflow) 1992-09-28

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