JPH02106824U - - Google Patents

Info

Publication number
JPH02106824U
JPH02106824U JP1605389U JP1605389U JPH02106824U JP H02106824 U JPH02106824 U JP H02106824U JP 1605389 U JP1605389 U JP 1605389U JP 1605389 U JP1605389 U JP 1605389U JP H02106824 U JPH02106824 U JP H02106824U
Authority
JP
Japan
Prior art keywords
plasma generation
tube
plasma
microwave
oscillation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1605389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1605389U priority Critical patent/JPH02106824U/ja
Publication of JPH02106824U publication Critical patent/JPH02106824U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1605389U 1989-02-14 1989-02-14 Pending JPH02106824U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1605389U JPH02106824U (enrdf_load_stackoverflow) 1989-02-14 1989-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1605389U JPH02106824U (enrdf_load_stackoverflow) 1989-02-14 1989-02-14

Publications (1)

Publication Number Publication Date
JPH02106824U true JPH02106824U (enrdf_load_stackoverflow) 1990-08-24

Family

ID=31228647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1605389U Pending JPH02106824U (enrdf_load_stackoverflow) 1989-02-14 1989-02-14

Country Status (1)

Country Link
JP (1) JPH02106824U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003052807A1 (fr) * 2001-12-14 2003-06-26 Tokyo Electron Limited Processeur a plasma

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003052807A1 (fr) * 2001-12-14 2003-06-26 Tokyo Electron Limited Processeur a plasma

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