JPS6224940U - - Google Patents

Info

Publication number
JPS6224940U
JPS6224940U JP11587985U JP11587985U JPS6224940U JP S6224940 U JPS6224940 U JP S6224940U JP 11587985 U JP11587985 U JP 11587985U JP 11587985 U JP11587985 U JP 11587985U JP S6224940 U JPS6224940 U JP S6224940U
Authority
JP
Japan
Prior art keywords
plasma
plasma generation
microwave
generation tube
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11587985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0323303Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11587985U priority Critical patent/JPH0323303Y2/ja
Publication of JPS6224940U publication Critical patent/JPS6224940U/ja
Application granted granted Critical
Publication of JPH0323303Y2 publication Critical patent/JPH0323303Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP11587985U 1985-07-30 1985-07-30 Expired JPH0323303Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11587985U JPH0323303Y2 (enrdf_load_stackoverflow) 1985-07-30 1985-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11587985U JPH0323303Y2 (enrdf_load_stackoverflow) 1985-07-30 1985-07-30

Publications (2)

Publication Number Publication Date
JPS6224940U true JPS6224940U (enrdf_load_stackoverflow) 1987-02-16
JPH0323303Y2 JPH0323303Y2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=30999947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11587985U Expired JPH0323303Y2 (enrdf_load_stackoverflow) 1985-07-30 1985-07-30

Country Status (1)

Country Link
JP (1) JPH0323303Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0323303Y2 (enrdf_load_stackoverflow) 1991-05-21

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