JPH0323303Y2 - - Google Patents

Info

Publication number
JPH0323303Y2
JPH0323303Y2 JP11587985U JP11587985U JPH0323303Y2 JP H0323303 Y2 JPH0323303 Y2 JP H0323303Y2 JP 11587985 U JP11587985 U JP 11587985U JP 11587985 U JP11587985 U JP 11587985U JP H0323303 Y2 JPH0323303 Y2 JP H0323303Y2
Authority
JP
Japan
Prior art keywords
plasma
microwave
plasma generation
plasma processing
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11587985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6224940U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11587985U priority Critical patent/JPH0323303Y2/ja
Publication of JPS6224940U publication Critical patent/JPS6224940U/ja
Application granted granted Critical
Publication of JPH0323303Y2 publication Critical patent/JPH0323303Y2/ja
Expired legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP11587985U 1985-07-30 1985-07-30 Expired JPH0323303Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11587985U JPH0323303Y2 (enrdf_load_stackoverflow) 1985-07-30 1985-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11587985U JPH0323303Y2 (enrdf_load_stackoverflow) 1985-07-30 1985-07-30

Publications (2)

Publication Number Publication Date
JPS6224940U JPS6224940U (enrdf_load_stackoverflow) 1987-02-16
JPH0323303Y2 true JPH0323303Y2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=30999947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11587985U Expired JPH0323303Y2 (enrdf_load_stackoverflow) 1985-07-30 1985-07-30

Country Status (1)

Country Link
JP (1) JPH0323303Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6224940U (enrdf_load_stackoverflow) 1987-02-16

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