JPS6256137U - - Google Patents

Info

Publication number
JPS6256137U
JPS6256137U JP14560285U JP14560285U JPS6256137U JP S6256137 U JPS6256137 U JP S6256137U JP 14560285 U JP14560285 U JP 14560285U JP 14560285 U JP14560285 U JP 14560285U JP S6256137 U JPS6256137 U JP S6256137U
Authority
JP
Japan
Prior art keywords
plasma generation
reflected power
microwave
processing apparatus
generation tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14560285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0323304Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14560285U priority Critical patent/JPH0323304Y2/ja
Publication of JPS6256137U publication Critical patent/JPS6256137U/ja
Application granted granted Critical
Publication of JPH0323304Y2 publication Critical patent/JPH0323304Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)
JP14560285U 1985-09-24 1985-09-24 Expired JPH0323304Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14560285U JPH0323304Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14560285U JPH0323304Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Publications (2)

Publication Number Publication Date
JPS6256137U true JPS6256137U (enrdf_load_stackoverflow) 1987-04-07
JPH0323304Y2 JPH0323304Y2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=31057294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14560285U Expired JPH0323304Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Country Status (1)

Country Link
JP (1) JPH0323304Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0323304Y2 (enrdf_load_stackoverflow) 1991-05-21

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