JPS6398666U - - Google Patents
Info
- Publication number
- JPS6398666U JPS6398666U JP19503386U JP19503386U JPS6398666U JP S6398666 U JPS6398666 U JP S6398666U JP 19503386 U JP19503386 U JP 19503386U JP 19503386 U JP19503386 U JP 19503386U JP S6398666 U JPS6398666 U JP S6398666U
- Authority
- JP
- Japan
- Prior art keywords
- silicon substrate
- diaphragm
- measurement pressure
- pressure sensor
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19503386U JPS6398666U (no) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19503386U JPS6398666U (no) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398666U true JPS6398666U (no) | 1988-06-25 |
Family
ID=31152547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19503386U Pending JPS6398666U (no) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398666U (no) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61121478A (ja) * | 1984-11-19 | 1986-06-09 | Sanyo Electric Co Ltd | 半導体圧力センサの製造方法 |
-
1986
- 1986-12-18 JP JP19503386U patent/JPS6398666U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61121478A (ja) * | 1984-11-19 | 1986-06-09 | Sanyo Electric Co Ltd | 半導体圧力センサの製造方法 |