JPS6427635U - - Google Patents
Info
- Publication number
- JPS6427635U JPS6427635U JP12267187U JP12267187U JPS6427635U JP S6427635 U JPS6427635 U JP S6427635U JP 12267187 U JP12267187 U JP 12267187U JP 12267187 U JP12267187 U JP 12267187U JP S6427635 U JPS6427635 U JP S6427635U
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- semiconductor substrate
- semiconductor
- bonding glass
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122671U JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122671U JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6427635U true JPS6427635U (no) | 1989-02-17 |
| JPH064301Y2 JPH064301Y2 (ja) | 1994-02-02 |
Family
ID=31370817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987122671U Expired - Lifetime JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064301Y2 (no) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006220519A (ja) * | 2005-02-10 | 2006-08-24 | Canon Anelva Technix Corp | 隔膜型圧力センサ |
| US7476695B2 (en) | 2004-03-16 | 2009-01-13 | Nissan Chemical Industries, Ltd. | Modified stannic oxide-zirconium oxide complex sol and method for preparing same |
| JP2013506841A (ja) * | 2009-10-01 | 2013-02-28 | ローズマウント インコーポレイテッド | 圧力センサマウントを備えた圧力トランスミッタ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10151647B2 (en) * | 2013-06-19 | 2018-12-11 | Honeywell International Inc. | Integrated SOI pressure sensor having silicon stress isolation member |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50105285A (no) * | 1974-01-25 | 1975-08-19 | ||
| JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
| JPS57171235A (en) * | 1981-04-15 | 1982-10-21 | Toshiba Corp | Semiconductor pressure converter |
-
1987
- 1987-08-11 JP JP1987122671U patent/JPH064301Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50105285A (no) * | 1974-01-25 | 1975-08-19 | ||
| JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
| JPS57171235A (en) * | 1981-04-15 | 1982-10-21 | Toshiba Corp | Semiconductor pressure converter |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7476695B2 (en) | 2004-03-16 | 2009-01-13 | Nissan Chemical Industries, Ltd. | Modified stannic oxide-zirconium oxide complex sol and method for preparing same |
| JP2006220519A (ja) * | 2005-02-10 | 2006-08-24 | Canon Anelva Technix Corp | 隔膜型圧力センサ |
| JP4683618B2 (ja) * | 2005-02-10 | 2011-05-18 | キヤノンアネルバ株式会社 | 隔膜型圧力センサ及びその製造方法 |
| JP2013506841A (ja) * | 2009-10-01 | 2013-02-28 | ローズマウント インコーポレイテッド | 圧力センサマウントを備えた圧力トランスミッタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH064301Y2 (ja) | 1994-02-02 |