JPH0227753U - - Google Patents
Info
- Publication number
- JPH0227753U JPH0227753U JP10651388U JP10651388U JPH0227753U JP H0227753 U JPH0227753 U JP H0227753U JP 10651388 U JP10651388 U JP 10651388U JP 10651388 U JP10651388 U JP 10651388U JP H0227753 U JPH0227753 U JP H0227753U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- thin
- diaphragm
- sensor chip
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10651388U JPH0227753U (no) | 1988-08-11 | 1988-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10651388U JPH0227753U (no) | 1988-08-11 | 1988-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0227753U true JPH0227753U (no) | 1990-02-22 |
Family
ID=31340098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10651388U Pending JPH0227753U (no) | 1988-08-11 | 1988-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0227753U (no) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002071493A (ja) * | 2000-06-13 | 2002-03-08 | Denso Corp | 半導体圧力センサ |
| JP2005351901A (ja) * | 2004-06-11 | 2005-12-22 | Samsung Electronics Co Ltd | 複合センサ及びその製造方法 |
| JP2012042392A (ja) * | 2010-08-20 | 2012-03-01 | Denso Corp | 半導体圧力センサ |
| JP2015141107A (ja) * | 2014-01-29 | 2015-08-03 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーの製造方法、圧力センサー、高度計、電子機器および移動体 |
-
1988
- 1988-08-11 JP JP10651388U patent/JPH0227753U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002071493A (ja) * | 2000-06-13 | 2002-03-08 | Denso Corp | 半導体圧力センサ |
| JP4710147B2 (ja) * | 2000-06-13 | 2011-06-29 | 株式会社デンソー | 半導体圧力センサ |
| JP2005351901A (ja) * | 2004-06-11 | 2005-12-22 | Samsung Electronics Co Ltd | 複合センサ及びその製造方法 |
| JP2012042392A (ja) * | 2010-08-20 | 2012-03-01 | Denso Corp | 半導体圧力センサ |
| JP2015141107A (ja) * | 2014-01-29 | 2015-08-03 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーの製造方法、圧力センサー、高度計、電子機器および移動体 |