JPS62197036U - - Google Patents
Info
- Publication number
- JPS62197036U JPS62197036U JP8644386U JP8644386U JPS62197036U JP S62197036 U JPS62197036 U JP S62197036U JP 8644386 U JP8644386 U JP 8644386U JP 8644386 U JP8644386 U JP 8644386U JP S62197036 U JPS62197036 U JP S62197036U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- silicon
- hole
- pressure
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8644386U JPS62197036U (no) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8644386U JPS62197036U (no) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197036U true JPS62197036U (no) | 1987-12-15 |
Family
ID=30942752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8644386U Pending JPS62197036U (no) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197036U (no) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005091166A (ja) * | 2003-09-17 | 2005-04-07 | Matsushita Electric Works Ltd | 半導体圧力センサ |
| JP2013512422A (ja) * | 2009-11-26 | 2013-04-11 | コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング | センサモジュールおよびセンサモジュールの製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522125A (en) * | 1978-08-04 | 1980-02-16 | Hitachi Ltd | Pressure sensor |
| JPS5821131A (ja) * | 1981-07-29 | 1983-02-07 | Toshiba Corp | 半導体圧力センサ |
-
1986
- 1986-06-06 JP JP8644386U patent/JPS62197036U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522125A (en) * | 1978-08-04 | 1980-02-16 | Hitachi Ltd | Pressure sensor |
| JPS5821131A (ja) * | 1981-07-29 | 1983-02-07 | Toshiba Corp | 半導体圧力センサ |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005091166A (ja) * | 2003-09-17 | 2005-04-07 | Matsushita Electric Works Ltd | 半導体圧力センサ |
| JP2013512422A (ja) * | 2009-11-26 | 2013-04-11 | コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング | センサモジュールおよびセンサモジュールの製造方法 |