JPS639656B2 - - Google Patents

Info

Publication number
JPS639656B2
JPS639656B2 JP55066092A JP6609280A JPS639656B2 JP S639656 B2 JPS639656 B2 JP S639656B2 JP 55066092 A JP55066092 A JP 55066092A JP 6609280 A JP6609280 A JP 6609280A JP S639656 B2 JPS639656 B2 JP S639656B2
Authority
JP
Japan
Prior art keywords
pattern
line
exposure
semiconductor device
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55066092A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56162834A (en
Inventor
Yasuo Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP6609280A priority Critical patent/JPS56162834A/ja
Publication of JPS56162834A publication Critical patent/JPS56162834A/ja
Publication of JPS639656B2 publication Critical patent/JPS639656B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6609280A 1980-05-19 1980-05-19 Semiconductor device Granted JPS56162834A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6609280A JPS56162834A (en) 1980-05-19 1980-05-19 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6609280A JPS56162834A (en) 1980-05-19 1980-05-19 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS56162834A JPS56162834A (en) 1981-12-15
JPS639656B2 true JPS639656B2 (en:Method) 1988-03-01

Family

ID=13305870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6609280A Granted JPS56162834A (en) 1980-05-19 1980-05-19 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS56162834A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02146652A (ja) * 1988-11-29 1990-06-05 Yokogawa Electric Corp Ｉ／ｏマルチプレクサ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020091632A (ko) * 2001-05-31 2002-12-06 엘지.필립스 엘시디 주식회사 슬릿형 포토 마스크

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02146652A (ja) * 1988-11-29 1990-06-05 Yokogawa Electric Corp Ｉ／ｏマルチプレクサ

Also Published As

Publication number Publication date
JPS56162834A (en) 1981-12-15

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