JPS63943B2 - - Google Patents
Info
- Publication number
- JPS63943B2 JPS63943B2 JP54156620A JP15662079A JPS63943B2 JP S63943 B2 JPS63943 B2 JP S63943B2 JP 54156620 A JP54156620 A JP 54156620A JP 15662079 A JP15662079 A JP 15662079A JP S63943 B2 JPS63943 B2 JP S63943B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- transferred
- wafer
- chip
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15662079A JPS5679431A (en) | 1979-12-03 | 1979-12-03 | Manufacture of semiconductor integrated circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15662079A JPS5679431A (en) | 1979-12-03 | 1979-12-03 | Manufacture of semiconductor integrated circuit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5679431A JPS5679431A (en) | 1981-06-30 |
| JPS63943B2 true JPS63943B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-09 |
Family
ID=15631688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15662079A Granted JPS5679431A (en) | 1979-12-03 | 1979-12-03 | Manufacture of semiconductor integrated circuit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5679431A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814137A (ja) * | 1981-07-16 | 1983-01-26 | Fujitsu Ltd | 縮小投影露光方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5420317A (en) * | 1977-07-15 | 1979-02-15 | Taiyo Electric Mfg | Exciter for brushless ac generator |
| JPS5662323A (en) * | 1979-10-26 | 1981-05-28 | Fujitsu Ltd | Reticle examination method |
-
1979
- 1979-12-03 JP JP15662079A patent/JPS5679431A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5679431A (en) | 1981-06-30 |