JPS639381B2 - - Google Patents

Info

Publication number
JPS639381B2
JPS639381B2 JP54043225A JP4322579A JPS639381B2 JP S639381 B2 JPS639381 B2 JP S639381B2 JP 54043225 A JP54043225 A JP 54043225A JP 4322579 A JP4322579 A JP 4322579A JP S639381 B2 JPS639381 B2 JP S639381B2
Authority
JP
Japan
Prior art keywords
type
region
forming
mask film
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54043225A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55134954A (en
Inventor
Osamu Hataishi
Yoshinobu Monma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4322579A priority Critical patent/JPS55134954A/ja
Publication of JPS55134954A publication Critical patent/JPS55134954A/ja
Publication of JPS639381B2 publication Critical patent/JPS639381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP4322579A 1979-04-10 1979-04-10 Preparation of semiconductor device Granted JPS55134954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4322579A JPS55134954A (en) 1979-04-10 1979-04-10 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4322579A JPS55134954A (en) 1979-04-10 1979-04-10 Preparation of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55134954A JPS55134954A (en) 1980-10-21
JPS639381B2 true JPS639381B2 (OSRAM) 1988-02-29

Family

ID=12657961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4322579A Granted JPS55134954A (en) 1979-04-10 1979-04-10 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55134954A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157541A (en) * 1981-03-24 1982-09-29 Toshiba Corp Manufacture of semiconductor device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028790A (OSRAM) * 1973-07-13 1975-03-24

Also Published As

Publication number Publication date
JPS55134954A (en) 1980-10-21

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