JPS6393114A - ドライエツチング装置 - Google Patents

Info

Publication number

JPS6393114A

JPS6393114A JP23967986A JP23967986A JPS6393114A JP S6393114 A JPS6393114 A JP S6393114A JP 23967986 A JP23967986 A JP 23967986A JP 23967986 A JP23967986 A JP 23967986A JP S6393114 A JPS6393114 A JP S6393114A

Authority

JP

Japan

Prior art keywords

cathode

reaction vessel

bellows

etching

dry etching

Prior art date

1986-10-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
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• 238000001312 dry etching Methods 0.000 title claims description 12
• 238000006243 chemical reaction Methods 0.000 claims abstract description 22
• 239000002184 metal Substances 0.000 claims abstract description 4
• 238000005530 etching Methods 0.000 abstract description 20
• 239000007789 gas Substances 0.000 abstract description 13
• 239000000463 material Substances 0.000 abstract description 6
• 238000000034 method Methods 0.000 abstract description 4
• 239000012495 reaction gas Substances 0.000 abstract description 4
• 238000010494 dissociation reaction Methods 0.000 abstract description 3
• 230000005593 dissociations Effects 0.000 abstract description 3
• 230000015572 biosynthetic process Effects 0.000 abstract 1
• 239000000498 cooling water Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 238000010849 ion bombardment Methods 0.000 description 2
• 150000002500 ions Chemical class 0.000 description 2
• 229910001369 Brass Inorganic materials 0.000 description 1
• 101100508407 Caenorhabditis elegans mua-6 gene Proteins 0.000 description 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 239000010951 brass Substances 0.000 description 1
• 239000003990 capacitor Substances 0.000 description 1
• 239000003795 chemical substances by application Substances 0.000 description 1
• 230000006866 deterioration Effects 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 239000002245 particle Substances 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 230000000087 stabilizing effect Effects 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (3)