JPS6391129A - ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置 - Google Patents

ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置

Info

Publication number
JPS6391129A
JPS6391129A JP61235970A JP23597086A JPS6391129A JP S6391129 A JPS6391129 A JP S6391129A JP 61235970 A JP61235970 A JP 61235970A JP 23597086 A JP23597086 A JP 23597086A JP S6391129 A JPS6391129 A JP S6391129A
Authority
JP
Japan
Prior art keywords
treatment layer
halogen
waste gas
soda lime
ccl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61235970A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348576B2 (https=
Inventor
Takao Yagi
八木　孝夫
Chitoshi Nogami
千俊 野上
Kunihiko Koike
国彦 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to JP61235970A priority Critical patent/JPS6391129A/ja
Publication of JPS6391129A publication Critical patent/JPS6391129A/ja
Publication of JPS6348576B2 publication Critical patent/JPS6348576B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
JP61235970A 1986-10-02 1986-10-02 ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置 Granted JPS6391129A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61235970A JPS6391129A (ja) 1986-10-02 1986-10-02 ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61235970A JPS6391129A (ja) 1986-10-02 1986-10-02 ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置

Publications (2)

Publication Number Publication Date
JPS6391129A true JPS6391129A (ja) 1988-04-21
JPS6348576B2 JPS6348576B2 (https=) 1988-09-29

Family

ID=16993905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61235970A Granted JPS6391129A (ja) 1986-10-02 1986-10-02 ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置

Country Status (1)

Country Link
JP (1) JPS6391129A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0962248A1 (en) * 1998-06-02 1999-12-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for CIF3 containing exhaust gases.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0962248A1 (en) * 1998-06-02 1999-12-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for CIF3 containing exhaust gases.

Also Published As

Publication number Publication date
JPS6348576B2 (https=) 1988-09-29

Similar Documents

Publication Publication Date Title
EP0962247B1 (en) Removal of NOx and SOx emissions from gaseous effluents
JPS6151935B2 (https=)
JP4488545B2 (ja) フッ化ハロゲンを含む排ガスの処理方法、処理剤及び処理装置
US4110183A (en) Process for denitration of exhaust gas
JP2581642B2 (ja) エッチング排ガス除害剤及び排ガス処理方法
JPS6347497B2 (https=)
JP4357018B2 (ja) ハロゲン化ガスの処理剤を用いた無害化方法
JPS6391129A (ja) ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置
JP2691927B2 (ja) 有害成分の除去方法
JP3490751B2 (ja) 気体状フッ化物の分解方法
JP3260825B2 (ja) 有害ガスの浄化方法
JP4482962B2 (ja) 六フッ化硫黄の無害化処理方法
EP0963779B1 (en) Method of treating exhaust gases containing halogen based compound
JP4459648B2 (ja) フッ素含有化合物を含むガスの処理方法及び装置
JPH0679138A (ja) Ｎｆ▲３▼ガスの前処理方法
JPS63291624A (ja) ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法
KR100684201B1 (ko) 불소 포함 배기가스의 처리방법 및 이의 방법을 사용하기위한 흡착 컬럼 장치
JPH0378132B2 (https=)
JP2000157830A (ja) 排ガス処理方法および処理装置
JP2728926B2 (ja) 窒素弗化物含有排ガスの処理方法
CS198630B1 (cs) Prostředek pro zneškodnění plynných halogenvodíků
JPS6348575B2 (https=)
JPH06198128A (ja) ハロゲン系化合物を含有する排ガスの処理方法
JPH0561966B2 (https=)
JPS61195937A (ja) 水銀含有廃ガスの処理方法