JPS6391128A - CCl↓4含有廃ガスの分解処理方法 - Google Patents

CCl↓4含有廃ガスの分解処理方法

Info

Publication number
JPS6391128A
JPS6391128A JP61235969A JP23596986A JPS6391128A JP S6391128 A JPS6391128 A JP S6391128A JP 61235969 A JP61235969 A JP 61235969A JP 23596986 A JP23596986 A JP 23596986A JP S6391128 A JPS6391128 A JP S6391128A
Authority
JP
Japan
Prior art keywords
gas
waste gas
ccl
concentration
ccρ
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61235969A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348575B2 (enExample
Inventor
Takao Yagi
八木 孝夫
Chitoshi Nogami
千俊 野上
Kunihiko Koike
国彦 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to JP61235969A priority Critical patent/JPS6391128A/ja
Publication of JPS6391128A publication Critical patent/JPS6391128A/ja
Publication of JPS6348575B2 publication Critical patent/JPS6348575B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
JP61235969A 1986-10-02 1986-10-02 CCl↓4含有廃ガスの分解処理方法 Granted JPS6391128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61235969A JPS6391128A (ja) 1986-10-02 1986-10-02 CCl↓4含有廃ガスの分解処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61235969A JPS6391128A (ja) 1986-10-02 1986-10-02 CCl↓4含有廃ガスの分解処理方法

Publications (2)

Publication Number Publication Date
JPS6391128A true JPS6391128A (ja) 1988-04-21
JPS6348575B2 JPS6348575B2 (enExample) 1988-09-29

Family

ID=16993892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61235969A Granted JPS6391128A (ja) 1986-10-02 1986-10-02 CCl↓4含有廃ガスの分解処理方法

Country Status (1)

Country Link
JP (1) JPS6391128A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151263A (en) * 1989-08-05 1992-09-29 Dupont-Mitsui Fluorochemicals Co., Ltd. Process for the catalyic decomposition of chlorofluoro-alkanes
JP2001149752A (ja) * 1999-11-26 2001-06-05 Yoshizawa Lime Industry 排ガスの処理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151263A (en) * 1989-08-05 1992-09-29 Dupont-Mitsui Fluorochemicals Co., Ltd. Process for the catalyic decomposition of chlorofluoro-alkanes
JP2001149752A (ja) * 1999-11-26 2001-06-05 Yoshizawa Lime Industry 排ガスの処理方法

Also Published As

Publication number Publication date
JPS6348575B2 (enExample) 1988-09-29

Similar Documents

Publication Publication Date Title
AU685691B2 (en) Method and compositions for chlorine dioxide manufacture
JP7491222B2 (ja) ハロゲンフッ化物の除去方法およびハロゲンフッ化物混合ガス中の含有ガス成分の定量分析方法、定量分析装置
JP4488545B2 (ja) フッ化ハロゲンを含む排ガスの処理方法、処理剤及び処理装置
JPH0280310A (ja) 三弗化窒素ガスの精製方法
WO2001076725A1 (fr) Procede de traitement de gaz d'echappement contenant un compose fluore
JPS6161619A (ja) 排ガスの処理方法
JPS6347497B2 (enExample)
JP2581642B2 (ja) エッチング排ガス除害剤及び排ガス処理方法
JPS6391128A (ja) CCl↓4含有廃ガスの分解処理方法
JPH0257974B2 (enExample)
JPH06177B2 (ja) C1f▲下3▼を含有する排ガスの処理方法
JPH02273511A (ja) 窒素または炭素のハロゲン化物の無毒化方法
JP5771896B2 (ja) フッ化ヨウ素の除害方法
JPH0494723A (ja) フッ化塩素を含む排ガスの乾式処理方法
TW460310B (en) Particle composition, process and apparatus thereof for removing moisture from gas selected from the group consisting nitrogen trifluoride gas and fluorine gas
JPH09142833A (ja) アンモニア中の水分の除去方法および装置
JPS62289222A (ja) 気体吸着捕捉装置
JP2691927B2 (ja) 有害成分の除去方法
JP3260825B2 (ja) 有害ガスの浄化方法
JPH0716582B2 (ja) ガス状酸性ハロゲン化合物の除去方法
JPS62213822A (ja) アルシン含有ガスの処理方法
JPH0679138A (ja) Nf▲3▼ガスの前処理方法
JPH06154535A (ja) 有害ガスの浄化方法
JPS6348576B2 (enExample)
JP2000157830A (ja) 排ガス処理方法および処理装置