JPS638904Y2 - - Google Patents

Info

Publication number
JPS638904Y2
JPS638904Y2 JP1984125314U JP12531484U JPS638904Y2 JP S638904 Y2 JPS638904 Y2 JP S638904Y2 JP 1984125314 U JP1984125314 U JP 1984125314U JP 12531484 U JP12531484 U JP 12531484U JP S638904 Y2 JPS638904 Y2 JP S638904Y2
Authority
JP
Japan
Prior art keywords
mask substrate
foreign matter
cleaning
prevention plate
adhesion prevention
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984125314U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141256U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984125314U priority Critical patent/JPS6141256U/ja
Publication of JPS6141256U publication Critical patent/JPS6141256U/ja
Application granted granted Critical
Publication of JPS638904Y2 publication Critical patent/JPS638904Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1984125314U 1984-08-20 1984-08-20 マスク基板の洗浄装置 Granted JPS6141256U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984125314U JPS6141256U (ja) 1984-08-20 1984-08-20 マスク基板の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984125314U JPS6141256U (ja) 1984-08-20 1984-08-20 マスク基板の洗浄装置

Publications (2)

Publication Number Publication Date
JPS6141256U JPS6141256U (ja) 1986-03-15
JPS638904Y2 true JPS638904Y2 (cs) 1988-03-16

Family

ID=30684003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984125314U Granted JPS6141256U (ja) 1984-08-20 1984-08-20 マスク基板の洗浄装置

Country Status (1)

Country Link
JP (1) JPS6141256U (cs)

Also Published As

Publication number Publication date
JPS6141256U (ja) 1986-03-15

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